Thin film transistor and thin film transistor array panel including the same
    4.
    发明授权
    Thin film transistor and thin film transistor array panel including the same 有权
    薄膜晶体管和薄膜晶体管阵列面板包括它们

    公开(公告)号:US08957415B2

    公开(公告)日:2015-02-17

    申请号:US13664180

    申请日:2012-10-30

    CPC classification number: H01L29/78693

    Abstract: A thin film transistor includes: a gate electrode on a substrate; a source electrode; a drain electrode positioned in a same layer as the source electrode and facing the source electrode; an oxide semiconductor layer positioned between the gate electrode and the source electrode or drain electrode; and a gate insulating layer positioned between the gate electrode and the source electrode or drain electrode. The oxide semiconductor layer includes titanium oxide (TiOx) doped with niobium (Nb).

    Abstract translation: 薄膜晶体管包括:衬底上的栅电极; 源电极; 位于与源电极相同的层并且面对源电极的漏电极; 位于所述栅电极和所述源电极或漏电极之间的氧化物半导体层; 以及位于栅电极和源电极或漏电极之间的栅极绝缘层。 氧化物半导体层包括掺杂有铌(Nb)的氧化钛(TiOx)。

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