公开(公告)号：US11358240B2

公开(公告)日：2022-06-14

申请号：US15973462

申请日：2018-05-07

Applicant: Samsung Display Co., Ltd.

Inventor： Taekil Oh ,  Gyoowan Han ,  Wonyong Kim ,  Seungho Myoung ,  Jaeseok Park ,  Alexander Voronov ,  Jinhong Jeun

IPC: B23K26/362 ,  C22C38/08 ,  B23K26/067 ,  B23K26/082 ,  B23K26/06 ,  B23K26/382 ,  B23K103/02

Abstract: A method of manufacturing a deposition mask includes: a splitting process in which a laser beam irradiated from a light source is split into a plurality of laser beams; a scanning process in which the plurality of laser beams are simultaneously scanned onto the mask substrate; and a tuning process in which irradiation states of the plurality of laser beams are finely changed to correspond to shapes of the plurality of pattern holes while the plurality of laser beams are scanned.

公开(公告)号：US20190105736A1

公开(公告)日：2019-04-11

申请号：US15973462

申请日：2018-05-07

Applicant: Samsung Display Co., Ltd.

Inventor： Taekil OH ,  Gyoowan Han ,  Wonyong Kim ,  Seungho Myoung ,  Jaeseok Park ,  Alexander Voronov ,  Jinhong Jeun

IPC: B23K26/362 ,  C22C38/08 ,  B23K26/06 ,  B23K26/067 ,  B23K26/082

Abstract: A method of manufacturing a deposition mask includes: a splitting process in which a laser beam irradiated from a light source is split into a plurality of laser beams; a scanning process in which the plurality of laser beams are simultaneously scanned onto the mask substrate; and a tuning process in which irradiation states of the plurality of laser beams are finely changed to correspond to shapes of the plurality of pattern holes while the plurality of laser beams are scanned.