公开(公告)号：US20190105736A1

公开(公告)日：2019-04-11

申请号：US15973462

申请日：2018-05-07

Applicant: Samsung Display Co., Ltd.

Inventor： Taekil OH ,  Gyoowan Han ,  Wonyong Kim ,  Seungho Myoung ,  Jaeseok Park ,  Alexander Voronov ,  Jinhong Jeun

IPC: B23K26/362 ,  C22C38/08 ,  B23K26/06 ,  B23K26/067 ,  B23K26/082

Abstract: A method of manufacturing a deposition mask includes: a splitting process in which a laser beam irradiated from a light source is split into a plurality of laser beams; a scanning process in which the plurality of laser beams are simultaneously scanned onto the mask substrate; and a tuning process in which irradiation states of the plurality of laser beams are finely changed to correspond to shapes of the plurality of pattern holes while the plurality of laser beams are scanned.

公开(公告)号：US20220297236A1

公开(公告)日：2022-09-22

申请号：US17838243

申请日：2022-06-12

Applicant: Samsung Display Co., Ltd.

Inventor： Taekil OH ,  Gyoowan HAN ,  Wonyong KIM ,  Seungho Myoung ,  Jaeseok Park ,  Alexander VORONOV ,  Jinhong JEUN

IPC: B23K26/362 ,  C22C38/08 ,  B23K26/067 ,  B23K26/082 ,  B23K26/06 ,  B23K26/382

Abstract: An apparatus for manufacturing a deposition mask including a stage on which a mask substrate is mounted, a light source configured to irradiate a laser beam, a beam splitter configured to split the irradiated laser beam into a plurality of laser beams, a scanner configured to simultaneously scan the plurality of laser beams onto the mask substrate, and a tuner configured to finely change irradiation states of the plurality of laser beams to correspond to shapes of a plurality of pattern holes, while the plurality of laser beams are scanned.

公开(公告)号：US20200156187A1

公开(公告)日：2020-05-21

申请号：US16680148

申请日：2019-11-11

Applicant: Samsung Display Co., Ltd.

Inventor： Yeonghwan KO ,  Taekil OH ,  Gyoowan HAN ,  Jooseob AHN ,  Yoongyeong BAE

IPC: B23K26/362 ,  G02B27/10 ,  G02B19/00 ,  G02B27/28 ,  B23K26/06 ,  B23K26/0622 ,  B23K26/067 ,  B23K26/073

Abstract: A laser apparatus may include a laser generator generating at least one a laser beam, which is used as an input light, an optical system converting the input light, which is provided from the laser generator, into a plurality of pattern lights, and a stage, on which a target object is loaded. The output light may be irradiated onto the target object. The optical system may divide the input light into a plurality of divided lights, and the pattern lights may be produced by constructive interference of the plurality of divided lights. A diameter of each of the pattern lights may be smaller than a diameter of the input light.