公开(公告)号：US12078931B2

公开(公告)日：2024-09-03

申请号：US17113948

申请日：2020-12-07

Applicant: Samsung Display Co., Ltd.

Inventor： Seil Kim ,  Jongbum Kim ,  Junghyun Ahn ,  Sang Min Yi

IPC: H01L21/308 ,  C23C14/04 ,  G03F7/20

CPC classification number: G03F7/2002 ,  C23C14/042 ,  G09G2330/04 ,  Y10T428/12361 ,  Y10T428/12389

Abstract: A metal mask according to some embodiments of the present disclosure may include a metal thin film having a first thickness and having a first region including a transmission region defining first openings penetrating the metal thin film, and a non-transmission region including an etching portion having a second thickness that is smaller than the first thickness, and a second region adjacent the first region, and defining second openings penetrating the metal thin film, wherein an opening density of the first region is less than an opening density of the second region, the opening density of the first region being defined as a number of the first openings per an area of the first region, and the opening density of the second region being defined as a number of the second openings per an area of the second region.

公开(公告)号：US20250059638A1

公开(公告)日：2025-02-20

申请号：US18754712

申请日：2024-06-26

Applicant: Samsung Display Co., Ltd.

Inventor： Sangwoo Jo ,  Youngeun Ryu ,  Junghyun Ahn ,  Yuri Lee ,  Sangheon Jeon

IPC: C23C14/04

Abstract: A mask assembly and an apparatus for manufacturing a display apparatus are provided. The mask assembly includes a mask frame including an opening area, at least one mask sheet covering the opening area of the mask frame, and a support stick disposed between the mask frame and the at least one mask sheet, extending in a first direction to traverse the opening area, and having both ends fixed to the mask frame. The at least one mask sheet includes submasks disposed side by side in a direction intersecting the first direction in which the support stick extends, and a connection stick disposed between the submasks and connecting two adjacent submasks among the submasks. The connection stick overlaps the support stick in a plan view.

公开(公告)号：US20240318296A1

公开(公告)日：2024-09-26

申请号：US18508606

申请日：2023-11-14

Applicant: Samsung Display Co., Ltd.

Inventor： Junghyun Ahn ,  Jaesuk Moon ,  Seungjin Lee

IPC: C23C14/04 ,  H10K71/16

CPC classification number: C23C14/042 ,  H10K71/166

Abstract: An apparatus for manufacturing a display device includes a chamber, a mask assembly arranged inside the chamber and facing a display substrate, an electrostatic chuck arranged inside the chamber, making the display substrate to be in close contact with the mask assembly, and including a plurality of magnetic members, and a magnetic force unit arranged inside the chamber and comprising a plurality of magnet units that apply magnetic force to the mask assembly. Each of the plurality of magnet units extends in a first direction and are arranged to be spaced apart from each other in a second direction intersecting the first direction, and each of the plurality of magnetic members has a side overlapping at least one of the plurality of magnet units and another side overlapping an opening between two adjacent ones of the plurality of magnet units in a plan view.

公开(公告)号：US11408063B2

公开(公告)日：2022-08-09

申请号：US16516176

申请日：2019-07-18

Applicant: Samsung Display Co., Ltd.

Inventor： Minseok Kim ,  Junghyun Ahn ,  Jongdae Lee ,  Wonyoung Jang

IPC: B23K28/00 ,  C23C14/04 ,  H01L51/00 ,  H01L27/32

Abstract: A method of manufacturing a mask frame assembly includes: welding fixing ends of a long-side support bar on a frame; and fixing a mask having a pattern area to be divided by the long-side support bar, on the frame, wherein the welding of the fixing ends of the long-side support bar on the frame includes forming welds asymmetrically with respect to a longitudinal central axis of the fixing ends.