PEELING DEVICE AND PEELING METHOD USING THE SAME

    公开(公告)号:US20240001665A1

    公开(公告)日:2024-01-04

    申请号:US18468675

    申请日:2023-09-15

    Abstract: A peeling device includes a peeling tank for containing a first solution therein, a support portion on which a stack structure including a base layer extending in a first direction and a film coupled with the base layer is disposed, the support portion being disposed in the peeling tank and an adsorption device for adsorbing the base layer thereon to peel off the base layer from the film, the adsorption device including an adsorption portion for adsorbing the base layer, and a moving portion coupled with the adsorption portion for moving the adsorption portion to allow the base layer to be bent to a second direction crossing the first direction and to be peeled off from the film.

    PEELING DEVICE AND PEELING METHOD USING THE SAME

    公开(公告)号:US20220212459A1

    公开(公告)日:2022-07-07

    申请号:US17445976

    申请日:2021-08-26

    Abstract: A peeling device includes a peeling tank for containing a first solution therein, a support portion on which a stack structure including a base layer extending in a first direction and a film coupled with the base layer is disposed, the support portion being disposed in the peeling tank and an adsorption device for adsorbing the base layer thereon to peel off the base layer from the film, the adsorption device including an adsorption portion for adsorbing the base layer, and a moving portion coupled with the adsorption portion for moving the adsorption portion to allow the base layer to be bent to a second direction crossing the first direction and to be peeled off from the film.

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