公开(公告)号：US20150034614A1

公开(公告)日：2015-02-05

申请号：US14170350

申请日：2014-01-31

Applicant: Samsung Display Co., Ltd.

Inventor： Joon-Hyung KIM ,  Hae-Sook LEE ,  Sung-Gon KIM ,  IL-Young JEONG ,  Gyoo-Wan HAN ,  Je-Kil RYU ,  Kyoung-Seok CHO

IPC: H01L21/66 ,  B23K26/03 ,  B23K26/00

CPC classification number: H01L22/20 ,  B23K26/032 ,  B23K26/705 ,  B23K2103/56

Abstract: A laser irradiation apparatus is provided. The laser irradiation apparatus includes a laser beam generator configured to generate laser beams; a slit unit configured to selectively transmit the laser beams; a mirror unit configured to change a path of the selectively transmitted laser beams, so as to irradiate the selectively transmitted laser beams onto a processing target; a first optical system, wherein a first portion of the selectively transmitted laser beams penetrates through the mirror unit and is projected to the first optical system; and a second optical system, wherein a second portion of the selectively transmitted laser beams penetrates through the mirror unit and is projected to the second optical system.

Abstract translation: 提供了一种激光照射装置。 激光照射装置包括：激光束发生器，被配置为产生激光束; 狭缝单元，被配置为选择性地透射所述激光束; 被配置为改变选择性透射的激光束的路径的反射镜单元，以便将选择性透射的激光束照射到处理目标上; 第一光学系统，其中所述选择性透射的激光束的第一部分穿透所述反射镜单元并被投影到所述第一光学系统; 以及第二光学系统，其中所述选择性透射的激光束的第二部分穿过所述反射镜单元并被投影到所述第二光学系统。

公开(公告)号：US20140268265A1

公开(公告)日：2014-09-18

申请号：US14190661

申请日：2014-02-26

Applicant: Samsung Display Co., Ltd.

Inventor： Sung-Gon KIM ,  Je-Kil RYU ,  Gyoo-Wan HAN ,  Hae-Sook LEE ,  Tae-Yong KIM

IPC: G02B26/08

CPC classification number: G02B26/0816 ,  G02B7/1825 ,  H01S5/0071

Abstract: Apparatus for uniformizing light amount distribution by shaking line beams along a longitudinal axis direction is provided. The apparatus includes a mirror mount, a mirror, an actuator, and a deformation member. The mirror fixed to the mirror mount and includes a reflective surface. The actuator is disposed at a distance from the mirror mount and configured to repeat expansion and contraction along a first direction. The deformation member includes a plurality of blocks connected to each other by flexible joints and is coupled to the actuator and the mirror mount. The deformation member is configured to change a displacement in the first direction due to operation of the actuator to a displacement in a second direction that crosses the first direction, amplify the changed displacement, and transmit the amplified displacement to the mirror mount.

Abstract translation: 提供了通过沿纵向轴线方向抖动线束使光量分布均匀化的装置。 该装置包括反射镜安装件，反射镜，致动器和变形构件。 镜子固定在镜面支架上并包括一个反光表面。 致动器设置在距反射镜安装座一定距离处，并被配置成沿着第一方向重复膨胀和收缩。 变形构件包括通过柔性接头彼此连接并且连接到致动器和反射镜座的多个块。 变形构件被构造成将由于致动器的操作引起的在第一方向上的位移沿与第一方向相交的第二方向的位移改变，放大变化的位移，并将放大的位移传递到镜面安装件。