公开(公告)号：US20150034614A1

公开(公告)日：2015-02-05

申请号：US14170350

申请日：2014-01-31

Applicant: Samsung Display Co., Ltd.

Inventor： Joon-Hyung KIM ,  Hae-Sook LEE ,  Sung-Gon KIM ,  IL-Young JEONG ,  Gyoo-Wan HAN ,  Je-Kil RYU ,  Kyoung-Seok CHO

IPC: H01L21/66 ,  B23K26/03 ,  B23K26/00

CPC classification number: H01L22/20 ,  B23K26/032 ,  B23K26/705 ,  B23K2103/56

Abstract: A laser irradiation apparatus is provided. The laser irradiation apparatus includes a laser beam generator configured to generate laser beams; a slit unit configured to selectively transmit the laser beams; a mirror unit configured to change a path of the selectively transmitted laser beams, so as to irradiate the selectively transmitted laser beams onto a processing target; a first optical system, wherein a first portion of the selectively transmitted laser beams penetrates through the mirror unit and is projected to the first optical system; and a second optical system, wherein a second portion of the selectively transmitted laser beams penetrates through the mirror unit and is projected to the second optical system.

Abstract translation: 提供了一种激光照射装置。 激光照射装置包括：激光束发生器，被配置为产生激光束; 狭缝单元，被配置为选择性地透射所述激光束; 被配置为改变选择性透射的激光束的路径的反射镜单元，以便将选择性透射的激光束照射到处理目标上; 第一光学系统，其中所述选择性透射的激光束的第一部分穿透所述反射镜单元并被投影到所述第一光学系统; 以及第二光学系统，其中所述选择性透射的激光束的第二部分穿过所述反射镜单元并被投影到所述第二光学系统。

公开(公告)号：US20170082851A1

公开(公告)日：2017-03-23

申请号：US15364594

申请日：2016-11-30

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Gyoo-Wan HAN ,  Ku-Hyun KANG ,  Hae-Sook LEE ,  Jin-Hong JEUN ,  Kyoung-Seok CHO

IPC: G02B26/10 ,  G02B27/10 ,  G02B27/14 ,  G02F1/11

CPC classification number: G02B26/10 ,  G02B13/0005 ,  G02B27/0927 ,  G02B27/0988 ,  G02B27/10 ,  G02B27/106 ,  G02B27/144 ,  G02F1/113 ,  H01L27/3244 ,  H01L27/3248 ,  H01L51/5228 ,  H01L51/56 ,  H01L2227/323

Abstract: A laser beam irradiation apparatus includes a laser light source, a controller for controlling energy of light generated by the laser source, a first optical system for adjusting a shape of light that has passed through the controller, a scanner for adjusting the direction of light that has passed through the first optical system, and an F-theta lens for reducing a beam that has passed through the scanner.

公开(公告)号：US20150243934A1

公开(公告)日：2015-08-27

申请号：US14510322

申请日：2014-10-09

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Gyoo-Wan HAN ,  Ku-Hyun KANG ,  Hae-Sook LEE ,  Jin-Hong JEUN ,  Kyoung-Seok CHO

IPC: H01L51/56 ,  H01L51/52 ,  G02B27/10 ,  G02B27/14 ,  G02B26/10 ,  G02F1/11

CPC classification number: G02B26/10 ,  G02B13/0005 ,  G02B27/0927 ,  G02B27/0988 ,  G02B27/10 ,  G02B27/106 ,  G02B27/144 ,  G02F1/113 ,  H01L27/3244 ,  H01L27/3248 ,  H01L51/5228 ,  H01L51/56 ,  H01L2227/323

Abstract: A laser beam irradiation apparatus includes a laser light source, a controller for controlling energy of light generated by the laser source, a first optical system for adjusting a shape of light that has passed through the controller, a scanner for adjusting the direction of light that has passed through the first optical system, and an F-theta lens for reducing a beam that has passed through the scanner.

Abstract translation: 激光束照射装置包括激光源，用于控制由激光源产生的光的能量的控制器，用于调节通过控制器的光的形状的第一光学系统，用于调节光的方向的扫描仪， 已经通过第一光学系统和用于减少已经通过扫描仪的光束的F-theta透镜。