公开(公告)号：US20210379694A1

公开(公告)日：2021-12-09

申请号：US17197701

申请日：2021-03-10

Applicant: Samsung Display Co., LTD.

Inventor： JUNHO JO ,  SEUNGWON KIM ,  YOUNGHO PARK ,  SEUNGYONG SONG ,  YOUNGCHUL LEE ,  SUNGSOON IM ,  YOUNGSUCK CHOI

IPC: B23K26/03 ,  B23K26/08 ,  B23K26/00 ,  B23K26/06 ,  B23K26/362 ,  B23K26/40

Abstract: A mask manufacturing equipment includes a first stage on which a mask frame is disposed, the mask frame including cell openings arranged in a first direction and a second direction intersecting the first direction, a transfer module that places cell masks on the mask frame to respectively overlap the cell openings of the mask frame and the cell masks, a camera module that photographs the cell masks, a first processing module that irradiates a first laser beam between a border portion corresponding to a portion of the mask frame adjacent to an N-th cell opening and a first edge area of an N-th cell mask disposed on the border portion, and a second processing module that irradiates a second laser beam to a boundary area between the first edge area and a second edge area extending from the first edge area.

公开(公告)号：US20220179322A1

公开(公告)日：2022-06-09

申请号：US17677188

申请日：2022-02-22

Applicant: Samsung Display Co., Ltd.

Inventor： JUNHO JO ,  YOUNGHO PARK ,  SEUNGYONG SONG ,  YOUNGCHUL LEE ,  YOUNGSUCK CHOI

IPC: G03F7/20

Abstract: A mask chuck may include a base plate including a central region and an edge region surrounding the central region, a head part including a first surface connected to the edge region of the base plate and configured to move on the edge region to be close to the central region or away from the central region, and a pad part disposed on a second surface of the head part opposite to the first surface of the head part. The edge region may include a first edge region extending in a first direction, a second edge region extending in the first direction and spaced apart from the first edge region in a second direction crossing the first direction, a third edge region extending in the second direction, and a fourth edge region extending in the second direction and spaced apart from the third edge region in the first direction.

公开(公告)号：US20220026813A1

公开(公告)日：2022-01-27

申请号：US17198469

申请日：2021-03-11

Applicant: Samsung Display Co., Ltd.

Inventor： JUNHO JO ,  YOUNGHO PARK ,  SEUNGYONG SONG ,  YOUNGCHUL LEE ,  YOUNGSUCK CHOI

IPC: G03F7/20

Abstract: A mask chuck may include a base plate including a central region and an edge region surrounding the central region, a head part including a first surface connected to the edge region of the base plate and configured to move on the edge region to be close to the central region or away from the central region, and a pad part disposed on a second surface of the head part opposite to the first surface of the head part. The edge region may include a first edge region extending in a first direction, a second edge region extending in the first direction and spaced apart from the first edge region in a second direction crossing the first direction, a third edge region extending in the second direction, and a fourth edge region extending in the second direction and spaced apart from the third edge region in the first direction.

公开(公告)号：US20220025507A1

公开(公告)日：2022-01-27

申请号：US17197300

申请日：2021-03-10

Applicant: Samsung Display Co., Ltd.

Inventor： JUNHO JO ,  YOUNGHO PARK ,  SEUNGYONG SONG ,  YOUNGCHUL LEE ,  YOUNGSUCK CHOI

IPC: C23C14/04

Abstract: A method for manufacturing a mask includes providing, on a stage, a mask frame in which a plurality of cell openings is defined; providing each of the cell openings with a cell mask material in which a second area and a plurality of first areas are defined, where the second area is disposed around each of the first areas; emitting a laser beam to the second area to harden the second area; and removing the first areas, thereby forming a plurality of cell masks disposed in the cell openings, respectively.