公开(公告)号：US20240035144A1

公开(公告)日：2024-02-01

申请号：US18318832

申请日：2023-05-17

Applicant: Samsung Display Co., Ltd.

Inventor： HEEMIN PARK ,  ARONG KIM ,  YOUNGMIN MOON ,  YOUNGHO PARK ,  AREUM LEE ,  SUNGSOON IM ,  JUNHO JO

IPC: C23C14/04

CPC classification number: C23C14/042

Abstract: A mask frame includes a first surface facing a mask, a second surface extending from a side of the first surface at an angle, a third surface extending from another side of the first surface at an angle to define a frame opening, and a first flow path including a first opening defined through the first surface and extending in a first direction and a second opening extending the first opening, defined through the second surface, and extending in a second direction different from the first direction.

公开(公告)号：US20240110272A1

公开(公告)日：2024-04-04

申请号：US18340329

申请日：2023-06-23

Applicant: Samsung Display Co., Ltd.

Inventor： HEEMIN PARK ,  ARONG KIM ,  YOUNGMIN MOON ,  YOUNGHO PARK ,  AREUM LEE ,  SUNGSOON IM ,  JUNHO JO

IPC: C23C14/04

CPC classification number: C23C14/042

Abstract: A mask assembly includes an open mask including first and second open openings defined therethrough and alternately arranged in a first direction, first unit masks respectively corresponding to the first open openings, and second unit masks respectively corresponding to the second open openings. Each of the first unit masks includes a first deposition portion through which first deposition openings are defined and first and second welding portions extending from the first deposition portion to the first direction and a direction opposite to the first direction, respectively. Each of the second unit masks includes a second deposition portion through which second deposition openings are defined and third and fourth welding portions extending from the second deposition portion to a second direction and a direction opposite to the second direction.

公开(公告)号：US20240035145A1

公开(公告)日：2024-02-01

申请号：US18329662

申请日：2023-06-06

Applicant: Samsung Display Co., Ltd.

Inventor： YOUNGMIN MOON ,  YOUNGHO PARK ,  JUNHO JO ,  ARONG KIM ,  HEEMIN PARK ,  AREUM LEE ,  SUNGSOON IM

IPC: C23C14/04 ,  C23C16/04

CPC classification number: C23C14/042 ,  C23C16/042

Abstract: A mask assembly manufacturing apparatus includes a stage and a tensioner. A preliminary mask assembly including an open mask including a first opening and a second opening and a frame connected to the open mask disposed on the stage. The tensioner tensions a unit mask including a cell area including deposition openings and a holding area extending from the cell area, in a first direction. The cell area has a first width parallel to the first direction and a second width parallel to the second direction intersecting the first direction and greater than the first width.

公开(公告)号：US20230068722A1

公开(公告)日：2023-03-02

申请号：US17729463

申请日：2022-04-26

Applicant: Samsung Display Co., Ltd.

Inventor： YOUNGMIN MOON ,  YOUNGHO PARK ,  JUNHO JO ,  SEUNGYONG SONG ,  SUNGSOON IM

IPC: B23K37/04 ,  B23K26/21 ,  B23K26/38 ,  C23C14/04 ,  C23C14/24

Abstract: A display processing mask manufacturing apparatus includes a stage, a clamp arranged outside the stage, and a chuck configured to move in a direction and arranged above the stage. The clamp includes a first clamp and a second clamp spaced apart from the first clamp in a first direction and arranged at a position opposite to a position of the first clamp with respect to the stage, and the chuck includes a first chuck and a second chuck spaced apart from the first chuck in a second direction crossing the first direction.

公开(公告)号：US20210379694A1

公开(公告)日：2021-12-09

申请号：US17197701

申请日：2021-03-10

Applicant: Samsung Display Co., LTD.

Inventor： JUNHO JO ,  SEUNGWON KIM ,  YOUNGHO PARK ,  SEUNGYONG SONG ,  YOUNGCHUL LEE ,  SUNGSOON IM ,  YOUNGSUCK CHOI

IPC: B23K26/03 ,  B23K26/08 ,  B23K26/00 ,  B23K26/06 ,  B23K26/362 ,  B23K26/40

Abstract: A mask manufacturing equipment includes a first stage on which a mask frame is disposed, the mask frame including cell openings arranged in a first direction and a second direction intersecting the first direction, a transfer module that places cell masks on the mask frame to respectively overlap the cell openings of the mask frame and the cell masks, a camera module that photographs the cell masks, a first processing module that irradiates a first laser beam between a border portion corresponding to a portion of the mask frame adjacent to an N-th cell opening and a first edge area of an N-th cell mask disposed on the border portion, and a second processing module that irradiates a second laser beam to a boundary area between the first edge area and a second edge area extending from the first edge area.

公开(公告)号：US20240109092A1

公开(公告)日：2024-04-04

申请号：US18227206

申请日：2023-07-27

Applicant: Samsung Display Co., LTD.

Inventor： AREUM LEE ,  SUNGSOON IM ,  ARONG KIM ,  YOUNGMIN MOON ,  YOUNGHO PARK ,  HEEMIN PARK ,  JUNHO JO

IPC: B05B12/24

CPC classification number: B05B12/24

Abstract: A mask assembly includes a frame including first to fourth lateral parts connected to define a frame opening, an open sheet including a body part in which sheet openings arranged in a first direction and a second direction are defined to overlap the frame opening and a connecting part protruding from the body part and at least partially overlapping the frame, and masks, each including a deposition part having deposition openings defined therein and coupling parts that protrude from the deposition part and that are spaced apart from each other with the deposition part therebetween. The connecting part includes a first connecting part and a second connecting part that overlap the frame and a third connecting part and a fourth connecting part that at least partially overlap the frame.

公开(公告)号：US20220179322A1

公开(公告)日：2022-06-09

申请号：US17677188

申请日：2022-02-22

Applicant: Samsung Display Co., Ltd.

Inventor： JUNHO JO ,  YOUNGHO PARK ,  SEUNGYONG SONG ,  YOUNGCHUL LEE ,  YOUNGSUCK CHOI

IPC: G03F7/20

Abstract: A mask chuck may include a base plate including a central region and an edge region surrounding the central region, a head part including a first surface connected to the edge region of the base plate and configured to move on the edge region to be close to the central region or away from the central region, and a pad part disposed on a second surface of the head part opposite to the first surface of the head part. The edge region may include a first edge region extending in a first direction, a second edge region extending in the first direction and spaced apart from the first edge region in a second direction crossing the first direction, a third edge region extending in the second direction, and a fourth edge region extending in the second direction and spaced apart from the third edge region in the first direction.

公开(公告)号：US20220026813A1

公开(公告)日：2022-01-27

申请号：US17198469

申请日：2021-03-11

Applicant: Samsung Display Co., Ltd.

Inventor： JUNHO JO ,  YOUNGHO PARK ,  SEUNGYONG SONG ,  YOUNGCHUL LEE ,  YOUNGSUCK CHOI

IPC: G03F7/20

Abstract: A mask chuck may include a base plate including a central region and an edge region surrounding the central region, a head part including a first surface connected to the edge region of the base plate and configured to move on the edge region to be close to the central region or away from the central region, and a pad part disposed on a second surface of the head part opposite to the first surface of the head part. The edge region may include a first edge region extending in a first direction, a second edge region extending in the first direction and spaced apart from the first edge region in a second direction crossing the first direction, a third edge region extending in the second direction, and a fourth edge region extending in the second direction and spaced apart from the third edge region in the first direction.

公开(公告)号：US20220025507A1

公开(公告)日：2022-01-27

申请号：US17197300

申请日：2021-03-10

Applicant: Samsung Display Co., Ltd.

Inventor： JUNHO JO ,  YOUNGHO PARK ,  SEUNGYONG SONG ,  YOUNGCHUL LEE ,  YOUNGSUCK CHOI

IPC: C23C14/04

Abstract: A method for manufacturing a mask includes providing, on a stage, a mask frame in which a plurality of cell openings is defined; providing each of the cell openings with a cell mask material in which a second area and a plurality of first areas are defined, where the second area is disposed around each of the first areas; emitting a laser beam to the second area to harden the second area; and removing the first areas, thereby forming a plurality of cell masks disposed in the cell openings, respectively.