公开(公告)号：US20140338828A1

公开(公告)日：2014-11-20

申请号：US14063108

申请日：2013-10-25

Applicant: Samsung Display Co., Ltd.

Inventor： Seung Jun LEE ,  Young Woo LEE ,  Joon Hyung KIM

IPC: H05K3/00 ,  H01L21/683 ,  H01L51/00 ,  H01L21/70

CPC classification number: H05K3/007 ,  B32B38/10 ,  B32B38/1858 ,  B32B43/006 ,  B32B2457/20 ,  B32B2457/206 ,  G02F1/1303 ,  G02F1/133305 ,  H01L21/6835 ,  H01L21/707 ,  H01L51/003 ,  H05K2203/0147 ,  Y10T156/1168 ,  Y10T156/1184 ,  Y10T156/1961 ,  Y10T156/1967 ,  Y10T156/1978

Abstract: An apparatus for separating a first substrate and a second substrate which are in contact with each other, includes an upper transfer part which fixes the first substrate and transfers the first substrate in a positive X-axis direction in an XY coordinate system comprised of an X axis and an Y axis which perpendicularly intersect each other and a lower transfer part which is disposed under the upper transfer part with a gap therebetween and fixes and transfers the second substrate, wherein the lower transfer part comprises a first transfer section which transfers the second substrate in the positive X-axis direction, and a second transfer section which transfers the second substrate in the positive X-axis direction as well as a negative Y-axis direction.

Abstract translation: 一种用于分离彼此接触的第一基板和第二基板的设备包括：上转印部，其固定第一基板，并将X基准方向的XY轴坐标系的X轴方向转印 轴和彼此垂直相交的Y轴以及设置在上部转印部下方的下部转印部，并且固定并转印第二基板，其中，下部转印部包括第一转印部，该第二转印部转印第二基板 以及在正X轴方向和负Y轴方向上传送第二基板的第二传送部。