公开(公告)号：US20250027191A1

公开(公告)日：2025-01-23

申请号：US18440424

申请日：2024-02-13

Applicant: Samsung Display Co., Ltd.

Inventor： Jeongkuk Kim ,  Youngjin Song ,  Jinwoo Lee ,  Sugwoo Jung ,  Sungwon Cho ,  Junho Jo

IPC: C23C14/04 ,  H10K71/16

Abstract: An apparatus for manufacturing a display apparatus includes a mask assembly, wherein the mask assembly includes a first mask layer including a silicon material, a first portion, and a second portion on the first portion, wherein a first portion opening is disposed in the first portion and a plurality of second portion openings are disposed in the second portion above the first portion opening, and a second mask layer disposed on the first mask layer. The second mask layer includes an inorganic material, wherein the inorganic material has a plurality of second mask openings above the plurality of second portion openings, and wherein, in a cross-sectional view, a width of each of the plurality of second portion openings increases with distance from the second mask layer.