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公开(公告)号：US11619885B2
公开(公告)日：2023-04-04
申请号：US17677188
申请日：2022-02-22
发明人： Junho Jo , Youngho Park , Seungyong Song , Youngchul Lee , Youngsuck Choi
IPC分类号： G03F7/20
摘要： A mask chuck may include a base plate including a central region and an edge region surrounding the central region, a head part including a first surface connected to the edge region of the base plate and configured to move on the edge region to be close to the central region or away from the central region, and a pad part disposed on a second surface of the head part opposite to the first surface of the head part. The edge region may include a first edge region extending in a first direction, a second edge region extending in the first direction and spaced apart from the first edge region in a second direction crossing the first direction, a third edge region extending in the second direction, and a fourth edge region extending in the second direction and spaced apart from the third edge region in the first direction.
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2.发明授权公开(公告)号：US11776972B2
公开(公告)日：2023-10-03
申请号：US17097388
申请日：2020-11-13
发明人： Junho Jo , Seungwon Kim , Youngho Park , Youngchul Lee
CPC分类号： H01L27/1288 , C23C14/042 , C23C14/54 , H01L27/1285
摘要： An apparatus and a method for manufacturing a mask assembly and a method of manufacturing a display device are provided. The apparatus may include: a tensioning part configured to be spaced apart from a mask frame comprising at least one opening, the tensioning part configured to tension a mask sheet in at least one of a first direction and a second direction, the mask sheet comprising a cell area corresponding to the at least one opening, and a dummy portion arranged outside the cell area; a pressing part configured to correspond to the dummy portion and press the dummy portion in a third direction intersecting a plane in which the first direction and the second direction extend; and a header configured to irradiate a laser beam toward the mask sheet to fix the mask sheet to the mask frame.
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公开(公告)号：US11287749B2
公开(公告)日：2022-03-29
申请号：US17198469
申请日：2021-03-11
发明人： Junho Jo , Youngho Park , Seungyong Song , Youngchul Lee , Youngsuck Choi
IPC分类号： G03F7/20
摘要： A mask chuck may include a base plate including a central region and an edge region surrounding the central region, a head part including a first surface connected to the edge region of the base plate and configured to move on the edge region to be close to the central region or away from the central region, and a pad part disposed on a second surface of the head part opposite to the first surface of the head part. The edge region may include a first edge region extending in a first direction, a second edge region extending in the first direction and spaced apart from the first edge region in a second direction crossing the first direction, a third edge region extending in the second direction, and a fourth edge region extending in the second direction and spaced apart from the third edge region in the first direction.
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公开(公告)号：US10897010B2
公开(公告)日：2021-01-19
申请号：US15854661
申请日：2017-12-26
发明人： Junho Jo , Euigyu Kim
摘要： A mask frame assembly manufactured via an extension-welding process on a stage, the mask frame assembly includes: a mask frame disposed on a stage, the mask frame including a first frame and a second frame having a first length, and a third frame and a fourth frame having a second length, the second length less than the first length. The mask frame assembly also includes a mask having respective ends welded and combined onto the first frame and the second frame. The first frame and the second frame include a slot disposed toward the stage, and at least portions of the first frame and the second frame corresponding to the slot are not in contact with the stage. The third frame and the fourth frame and the stage are in contact with the stage.
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公开(公告)号：US20240102145A1
公开(公告)日：2024-03-28
申请号：US18347104
申请日：2023-07-05
发明人： Heemin Park , Arong Kim , Youngmin Moon , Youngho Park , Areum Lee , Sungsoon Im , Junho Jo
CPC分类号： C23C14/042 , H10K59/1201 , H10K71/166
摘要： An apparatus for manufacturing a display device includes a mask assembly, and a deposition source that supplies a deposition material toward the mask assembly. The mask assembly includes a mask frame including a first opening, a sheet portion fixed on the mask, overlapping a portion of the first opening in a plan view, and including a plurality of second openings, a plurality of first masks corresponding to the plurality of second openings and fixed on the sheet portion, each including a plurality of third openings, and a second mask arranged on another portion of the first opening defined by an edge of the sheet portion and inner surfaces of the first opening, fixed on the mask frame, and including a plurality of fourth openings.
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6.发明申请公开(公告)号：US20210343760A1
公开(公告)日：2021-11-04
申请号：US17097388
申请日：2020-11-13
发明人： Junho Jo , Seungwon Kim , Youngho Park , Youngchul Lee
摘要： An apparatus and a method for manufacturing a mask assembly and a method of manufacturing a display device are provided. The apparatus may include: a tensioning part configured to be spaced apart from a mask frame comprising at least one opening, the tensioning part configured to tension a mask sheet in at least one of a first direction and a second direction, the mask sheet comprising a cell area corresponding to the at least one opening, and a dummy portion arranged outside the cell area; a pressing part configured to correspond to the dummy portion and press the dummy portion in a third direction intersecting a plane in which the first direction and the second direction extend; and a header configured to irradiate a laser beam toward the mask sheet to fix the mask sheet to the mask frame.
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公开(公告)号：US09882129B2
公开(公告)日：2018-01-30
申请号：US15180921
申请日：2016-06-13
发明人： Junho Jo , Euigyu Kim
CPC分类号： H01L51/0011 , C23C14/042 , C23C16/042
摘要： A mask frame assembly manufactured via an extension-welding process on a stage, the mask frame assembly includes: a mask frame disposed on a stage, the mask frame including a first frame and a second frame having a first length, and a third frame and a fourth frame having a second length, the second length less than the first length. The mask frame assembly also includes a mask having respective ends welded and combined onto the first frame and the second frame. The first frame and the second frame include a slot disposed toward the stage, and at least portions of the first frame and the second frame corresponding to the slot are not in contact with the stage. The third frame and the fourth frame and the stage are in contact with the stage.
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公开(公告)号：US11864453B2
公开(公告)日：2024-01-02
申请号：US17452279
申请日：2021-10-26
发明人： Youngmin Moon , Minho Moon , Ji-Hee Son , Seungyong Song , Sungsoon Im , Junho Jo
IPC分类号： H01L51/56 , C23C14/04 , C23C14/24 , B23K26/244 , B23K26/364 , H10K71/00 , B23K26/0622
CPC分类号： H10K71/00 , B23K26/244 , B23K26/364 , C23C14/042 , C23C14/24 , B23K26/0622
摘要： Provided is a mask including a mask frame including a base part in which cell openings are defined, and a coating part surrounding edges of the cell openings, covering at least a portion of an upper surface of the base part, and including a materials that is different from that of the base part, and unit masks on the mask frame, respectively corresponding to the cell openings, including a material that is different from that of the coating part, and in which openings are defined.
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公开(公告)号：US11807932B2
公开(公告)日：2023-11-07
申请号：US17197300
申请日：2021-03-10
发明人： Junho Jo , Youngho Park , Seungyong Song , Youngchul Lee , Youngsuck Choi
IPC分类号： C23C14/04
CPC分类号： C23C14/042
摘要： A method for manufacturing a mask includes providing, on a stage, a mask frame in which a plurality of cell openings is defined; providing each of the cell openings with a cell mask material in which a second area and a plurality of first areas are defined, where the second area is disposed around each of the first areas; emitting a laser beam to the second area to harden the second area; and removing the first areas, thereby forming a plurality of cell masks disposed in the cell openings, respectively.
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