公开(公告)号：US12007333B2

公开(公告)日：2024-06-11

申请号：US17729344

申请日：2022-04-26

Applicant: Samsung Display Co., Ltd. ,  DIGITAL IMAGING TECHNOLOGY

Inventor： Janghoon Lee ,  Jin Woo Kim ,  Cheol Hyun Cho ,  Jayoung Cho ,  Leegu Han

IPC: G01N21/88 ,  G01N21/958

CPC classification number: G01N21/8851 ,  G01N21/958 ,  G01N2021/8867

Abstract: A system for inspecting thin glass includes: a housing including a body and a cover; a first shuttle which fixes an edge portion of the thin glass and reciprocates in a first axis direction; a first inspection part disposed on the body and which measures a position of a defect formed in the thin glass by taking a picture of the thin glass; a transport shuttle which separates the thin glass from the first shuttle, a second shuttle which separates the thin glass from the transport shuttle, fixes the thin glass, and reciprocates the upper surface of the body; and a second inspection part disposed on the body and spaced apart from the first inspection part and which inspects the position of the defect by taking an enlarged picture of the position of the defect. The first shuttle tensions and fixes the thin glass.