公开(公告)号：US20230162951A1

公开(公告)日：2023-05-25

申请号：US17992421

申请日：2022-11-22

Applicant: Samsung Display Co., Ltd. ,  WONIK IPS Co., Ltd.

Inventor： Daesoo KIM ,  Kyungbok KIM ,  Sanggab KIM ,  Juhee LEE ,  Daewon CHOI ,  Daeil KIM ,  Jaekeun KIM ,  Kwangjong YOO ,  Changnam CHOI ,  Hyunku PARK ,  Yunjong YEO

IPC: H01J37/32 ,  H01L27/12 ,  H10K71/00

CPC classification number: H01J37/32633 ,  H01J37/3244 ,  H01J37/32513 ,  H01J37/32522 ,  H01J37/32807 ,  H01L27/1259 ,  H01L51/56

Abstract: An apparatus and a method for manufacturing a display device are provided. The apparatus includes a plasma generator disposed outside a chamber, an adapter of the chamber, the adapter connecting the plasma generator to the chamber, a cooler connected to the adapter, an insulator connected to the cooler, and a diffuser connected to the insulator. A plasma generated by the plasma generator is supplied into the chamber through a flow path passing through the adapter, the cooler, the insulator, and the diffuser.