Wire grid polarizer and method of fabricating the same

    公开(公告)号:US09753201B2

    公开(公告)日:2017-09-05

    申请号:US14668617

    申请日:2015-03-25

    CPC classification number: G02B5/3058 B82Y40/00 G03F7/0002 G03F7/0005

    Abstract: Provided is a method of fabricating a wire grid polarizer, the method comprising an organic light-emitting display panel. According to an aspect of the present disclosure, there is provided a method comprising sequentially stacking a conductive wire pattern layer, a first neutral layer, a guide pattern layer and a second neutral layer on a substrate, forming etch-stop patterns on the second neutral layer, forming second neutral layer patterns and guide patterns by patterning the second neutral layer and the guide pattern layer using the etch-stop patterns, coating a block copolymer of two types of monomer blocks having different etch rates on the first neutral layer and the second neutral layer patterns, aligning the block copolymer, removing one type of monomer blocks from the aligned block copolymer, and patterning the conductive wire pattern layer using the remaining monomer blocks, the second neutral layer patterns, and the guide patterns.

    Liquid crystal display and manufacturing method thereof
    5.
    发明授权
    Liquid crystal display and manufacturing method thereof 有权
    液晶显示及其制造方法

    公开(公告)号:US09217900B2

    公开(公告)日:2015-12-22

    申请号:US14578703

    申请日:2014-12-22

    Abstract: A manufacturing method of a liquid crystal display includes: forming an etch target layer including a conductive material on a first substrate; forming a first mask layer on the etch target layer; forming a block copolymer coating layer including a plurality of polymers on the first mask layer; processing the block copolymer coating layer to form a block copolymer pattern layer including first and second polymer blocks; removing one of the first or second polymer blocks to form a second mask pattern layer; etching the first mask layer by using the second mask pattern layer as an etching mask to form a first mask pattern layer; and etching the etch target layer by using the first mask pattern layer as an etching mask to form a first electrode. The first electrode includes a plurality of the first minute patterns extending in a predetermined direction and having a polarization function.

    Abstract translation: 液晶显示器的制造方法包括:在第一基板上形成包括导电材料的蚀刻目标层; 在所述蚀刻目标层上形成第一掩模层; 在所述第一掩模层上形成包含多个聚合物的嵌段共聚物涂层; 处理嵌段共聚物涂层以形成包含第一和第二聚合物嵌段的嵌段共聚物图案层; 去除所述第一或第二聚合物嵌段之一以形成第二掩模图案层; 通过使用第二掩模图案层作为蚀刻掩模蚀刻第一掩模层以形成第一掩模图案层; 以及通过使用第一掩模图案层作为蚀刻掩模蚀刻蚀刻目标层以形成第一电极。 第一电极包括沿预定方向延伸并且具有偏振功能的多个第一微小图案。

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