公开(公告)号：US20240364299A1

公开(公告)日：2024-10-31

申请号：US18608106

申请日：2024-03-18

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Jong Woon KIM ,  Jeonga KIM ,  Jeong Hoon RYOU ,  Won HAN ,  Sang Uk SON ,  Tae Kyung LEE

IPC: H03H9/02 ,  H03H9/13

CPC classification number: H03H9/02157 ,  H03H9/02023 ,  H03H9/132

Abstract: A bulk acoustic resonator includes an active region in which a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode in a height direction, and a second electrode disposed on the piezoelectric layer in the height direction overlap each other in the height direction; a peripheral region in which the first electrode or the second electrode extends outwardly from the active region so that the first electrode and the second electrode do not overlap each other in the height direction in the peripheral region; and an auxiliary layer disposed in the peripheral region, wherein a first cutoff frequency of the active region is substantially equal to a second cutoff frequency of the peripheral region.

公开(公告)号：US20240356524A1

公开(公告)日：2024-10-24

申请号：US18584444

申请日：2024-02-22

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Won HAN ,  Sang Uk SON ,  Jong Woon KIM ,  Sungwook KIM ,  Jeong Hoon RYOU ,  Daehun JEONG ,  Jung-Eun YOUM ,  Sangheon HAN ,  Jeonga KIM ,  Hwasun LEE

IPC: H03H9/17 ,  H03H9/02

CPC classification number: H03H9/173 ,  H03H9/02118 ,  H03H9/02157

Abstract: A bulk acoustic resonator includes a resonance portion including a first electrode, a piezoelectric layer disposed on the first electrode along a height direction, and a second electrode disposed on the piezoelectric layer along the height direction. The resonance portion includes an overlapping region in which the first electrode, the piezoelectric layer, and the second electrode overlap each other along the height direction. The overlapping region includes a central portion and an edge portion disposed outside the central portion, and including a first edge portion and a second edge portion. A height of the second electrode of the first edge portion and a height of the second electrode of the second edge portion are lower than a height of the second electrode of the central portion along the height direction, and are different from each other along the height direction.