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公开(公告)号：US20230125049A1
公开(公告)日：2023-04-20
申请号：US17675058
申请日：2022-02-18
发明人： Hyun Min HWANG , Won HAN , Jeong Hoon RYOU , Jae Hyoung GIL , Dong Hoe KIM
摘要： A bulk acoustic wave filter includes series resonators connected to a series arm, and parallel resonators connected to a parallel arm connected to the series arm. Two or more of the series resonators are disposed in parallel on the series arm, and each includes a substrate, a lower electrode on the substrate, a piezoelectric layer on the lower electrode, and an upper electrode on the piezoelectric layer, wherein, when an active region in which the lower electrode, the piezoelectric layer, and the upper electrode overlap each other is viewed from above, a centroid of the active region and a center of a rectangle defining an aspect ratio of the active region match each other, and when the active region is viewed from above, the active region has a shape of polygon symmetrical with respect to at least one axis passing through a center of the rectangle defining the aspect ratio.
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公开(公告)号：US20230072487A1
公开(公告)日：2023-03-09
申请号：US17676905
申请日：2022-02-22
发明人： Won HAN , Hwa Sun LEE , Moon Chul LEE , Jeong Hoon RYOU , Tae Yoon KIM , Sang Kee YOON , Yong Suk KIM , Joung Hun KIM , Tae Kyung LEE , Jae Hyoung GIL
摘要： A bulk acoustic wave resonator is provided. The bulk acoustic wave resonator includes a board; a resonant portion including a first electrode, a piezoelectric layer, and a second electrode, and disposed on the board, and a temperature compensation layer disposed on the resonant portion, wherein the temperature compensation layer includes a temperature compensation portion formed of a dielectric and a loss compensation portion formed of a material different from a material of the temperature compensation portion, and wherein each of the temperature compensation portion and the loss compensation portion includes a plurality of linear patterns, and the linear patterns of the temperature compensation portion and the linear patterns of the loss compensation portion are alternately disposed.
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公开(公告)号：US20180102751A1
公开(公告)日：2018-04-12
申请号：US15702176
申请日：2017-09-12
发明人： Chang Hyun LIM , Won HAN , Moon Chul LEE , Tae Kyung LEE
CPC分类号： H03H3/04 , H03H9/02118 , H03H9/132 , H03H9/173 , H03H9/174 , H03H9/547 , H03H2003/021 , H03H2003/023 , H03H2003/0442 , H03H2009/02173
摘要： A bulk-acoustic wave resonator includes: a membrane layer disposed on a substrate and forming a cavity; a lower electrode disposed on the membrane layer; a piezoelectric layer disposed on the lower electrode; an upper electrode disposed on the piezoelectric layer, and including a frame part disposed at an edge of an active area and having a thickness greater than that of a portion of the upper electrode disposed in a central portion of the active area; and a frequency adjusting layer disposed on the piezoelectric layer and the upper electrode. The frequency adjusting layer is excluded from an inclined surface of the frame part, or a thickness of a portion of the frequency adjusting layer on the inclined surface is less than that of other portions of the frequency adjusting layer. The frequency adjusting layer is disposed on a portion of the piezoelectric layer protruding from the upper electrode.
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公开(公告)号：US20170244021A1
公开(公告)日：2017-08-24
申请号：US15271483
申请日：2016-09-21
发明人： Won HAN , Dae Hun JEONG , Jae Chang LEE , Tae Yoon KIM , Moon Chul LEE
IPC分类号： H01L41/047 , H01L41/29
CPC分类号： H01L41/0475 , H01L41/047 , H01L41/29 , H03H3/02 , H03H9/02118 , H03H9/173 , H03H2003/021
摘要： An acoustic resonator includes a resonating part including a piezoelectric layer located on a first electrode and a second electrode located on the piezoelectric layer; and a frame located on the second electrode along an edge of the resonating part, wherein the frame includes an inner surface and an outer surface, and the inner surface includes two inclined surfaces.
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公开(公告)号：US20170237409A1
公开(公告)日：2017-08-17
申请号：US15274359
申请日：2016-09-23
发明人： Won HAN , Moon Chul LEE , Jae Chang LEE , Sang Uk SON , Tae Hun LEE
IPC分类号： H03H9/17 , H01L41/047 , H01L41/053 , H03H9/54
CPC分类号： H03H9/17 , H01L41/047 , H01L41/053 , H03H9/13 , H03H9/173 , H03H9/54
摘要： An acoustic resonator includes: a substrate; a resonance part mounted on the substrate and including resonance part electrodes, the resonance part being configured to generate acoustic waves; a cavity disposed between the resonance part and the substrate; a frame part disposed on at least one electrode among the resonance part electrodes, and being configured to reflect the acoustic waves; and a connection electrode configured to connect the at least one electrode to an external electrode, and having a thickness less than a thickness of the at least one electrode.
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公开(公告)号：US20230216470A1
公开(公告)日：2023-07-06
申请号：US17824145
申请日：2022-05-25
发明人： Won HAN , Hwa Sun LEE , Jeong Hoon RYOU , Moon Chul LEE , Tae Yoon KIM , Sang Kee YOON , Yong Suk KIM , Joung Hun KIM , Sung Jun LEE , Sung Joon PARK
CPC分类号： H03H9/0211 , H03H9/173 , H03H9/02102
摘要： A bulk acoustic wave resonator includes a substrate; a central portion including a first portion of a first electrode, a first portion of a piezoelectric layer, and a first portion of a second electrode laminated in order on the substrate; and a reflective region disposed laterally of the central portion and including a second portion of the first electrode, an insertion layer, a second portion of the piezoelectric layer, and a second portion of the second electrode. A side surface of the insertion layer adjacent to the central portion has an inclined surface, the first portion of the second electrode and the second portion of the second electrode are coplanar, and an end of the second electrode overlaps the inclined surface of the insertion layer in the reflective region.
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公开(公告)号：US20200252051A1
公开(公告)日：2020-08-06
申请号：US16388979
申请日：2019-04-19
发明人： Won HAN , Tae Yoon KIM , Sang Uk SON , Chang Hyun LIM
摘要： A bulk-acoustic wave resonator includes a substrate; a membrane layer forming a cavity with the substrate; a first electrode at least partially disposed on an upper portion of the cavity including an end portion that is thicker than other portions of the first electrode; an insertion layer including a first portion disposed adjacent to from the end portion of the first electrode and a second portion disposed on an upper portion of the first electrode; a piezoelectric layer disposed to cover the insertion layer; and a second electrode disposed on an upper portion of the piezoelectric layer.
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公开(公告)号：US20180019726A1
公开(公告)日：2018-01-18
申请号：US15638809
申请日：2017-06-30
发明人： Sung HAN , Jae Chang LEE , Won HAN , Tae Yoon KIM , Jong Woon KIM , Tae Kyung LEE , Moon Chul LEE , Tae Hun LEE , Sung Min CHO , In Young KANG
CPC分类号： H03H9/1014 , H03H9/02086 , H03H9/02102 , H03H9/02118 , H03H9/02157 , H03H9/172 , H03H9/173 , H03H9/54
摘要： A bulk acoustic wave resonator device includes: a substrate; a lower electrode disposed on the substrate; a piezoelectric layer disposed over a portion of the lower electrode; an upper electrode disposed on the piezoelectric layer; and a shape control layer covering an edge of a cavity disposed between the substrate and the lower electrode, wherein tensile stress is applied to the shape control layer during formation of the shape control layer.
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公开(公告)号：US20180013397A1
公开(公告)日：2018-01-11
申请号：US15621552
申请日：2017-06-13
发明人： Chang Hyun LIM , Moon Chul LEE , Won HAN , Tae Kyung LEE , Dae Ho KIM
CPC分类号： H03H9/02015 , H03H3/02 , H03H9/02047 , H03H9/02118 , H03H9/1007 , H03H9/171 , H03H9/173 , H03H2003/021
摘要： A bulk acoustic wave filter device includes a substrate, a lower electrode on the substrate, a piezoelectric layer covering at least a portion of the lower electrode, and an upper electrode covering at least a portion of the piezoelectric layer. The upper electrode has a density reduction layer disposed on at least a portion thereof, except a central portion of a resonance region of the bulk acoustic wave filter device that deforms and vibrates with the piezoelectric layer during activation of the piezoelectric layer. The density reduction layer has a density lower than a density of other portions of the upper electrode.
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公开(公告)号：US20160182012A1
公开(公告)日：2016-06-23
申请号：US14918273
申请日：2015-10-20
发明人： Seung Mo LIM , Dong Woo LEE , Won HAN , Ran Hee SHIN
CPC分类号： H03H9/21
摘要： A tuning fork vibrator includes: a vibration arm including one or more grooves extending depthwise in a first direction; and exciting electrodes configured to provide a level of driving force required for vibrations of the vibration arm, wherein the one or more grooves have a cross-sectional shape in which a depth of the one or more grooves decreases from a first point toward a second point, and the depth of the one or more grooves at the second point is 30% or more of the depth of the groove at the first point.
摘要翻译： 音叉振动器包括：振动臂，包括在第一方向上沿深度方向延伸的一个或多个凹槽; 以及激励电极，其构造成提供振动臂的振动所需的驱动力水平，其中所述一个或多个凹槽具有其中所述一个或多个凹槽的深度从第一点向第二点减小的横截面形状 并且第二点处的一个或多个凹槽的深度在第一点处为凹槽的深度的30％或更多。
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