公开(公告)号：US20160035960A1

公开(公告)日：2016-02-04

申请号：US14642054

申请日：2015-03-09

申请人： Samsung Electro-Mechanics Co., Ltd.

发明人： Moon Chul LEE ,  Jea Shik SHIN ,  Young Gyu LEE ,  Ho Soo PARK ,  Duck Hwan KIM

IPC分类号： H01L41/047 ,  H01L41/332

CPC分类号： H03H9/173 ,  H03H2003/021

摘要： An acoustic resonator is provided in which loss of acoustic waves in a transverse direction may be reduced through a cavity formed in an acoustic resonance unit including a first electrode, a piezoelectric layer, and a second electrode, and in which acoustic waves in a longitudinal direction may be reduced by forming an air gap between the acoustic resonance unit and a substrate. Whereby, a quality factor may be improved.

摘要翻译： 提供一种声谐振器，其中可以通过在包括第一电极，压电层和第二电极的声共振单元中形成的空腔来减小横向的声波损失，并且其中沿纵向的声波 可以通过在声共振单元和基板之间形成气隙来减小。 因此，可以改善品质因素。