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公开(公告)号：US10508333B2
公开(公告)日：2019-12-17
申请号：US15417503
申请日：2017-01-27
Applicant: Samsung Electronics Co., Ltd.
Inventor： Byeong-Hoon Kim , Byung-Hwan Kong , Sung-Han Lee , Sun Cho , Seung-Hwan Kang , Seung-Ho Lee , Han-Seo Ko
Abstract: A heating apparatus including a side wall heat insulator configured to provide an inner space for receiving a reaction tube, an upper wall heat insulator covering a top portion of the side wall heat insulator, a heat generation part in an inner surface of the side wall heat insulator, and a heat compensating part on a lower surface of the upper wall heat insulator, the heat compensating part including a reflection surface in a first region on the lower surface of the upper wall heat insulator, the first region having a first emissivity less than an emissivity of the upper wall heat insulator may be provided.
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公开(公告)号：US20170218507A1
公开(公告)日：2017-08-03
申请号：US15417503
申请日：2017-01-27
Applicant: Samsung Electronics Co., Ltd.
Inventor： BYEONG-HOON KIM , Byung-Hwan Kong , Sung-Han Lee , Sun Cho , Seung-Hwan Kang , Seung-Ho Lee , Han-Seo Ko
IPC: C23C16/02 , C23C16/458 , F28F13/18 , H05B1/02 , H05B3/46
CPC classification number: C23C16/0209 , C23C16/4584 , C23C16/4587 , C23C16/46 , C23C16/463 , F28F13/18 , H01L21/67017 , H01L21/67109 , H01L21/67115 , H05B1/0233 , H05B3/46
Abstract: A heating apparatus including a side wall heat insulator configured to provide an inner space for receiving a reaction tube, an upper wall heat insulator covering a top portion of the side wall heat insulator, a heat generation part in an inner surface of the side wall heat insulator, and a heat compensating part on a lower surface of the upper wall heat insulator, the heat compensating part including a reflection surface in a first region on the lower surface of the upper wall heat insulator, the first region having a first emissivity less than an emissivity of the upper wall heat insulator may be provided.
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