公开(公告)号：US12125909B2

公开(公告)日：2024-10-22

申请号：US17584580

申请日：2022-01-26

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jongsung Woo ,  Changmin Jeon ,  Yongkyu Lee

IPC: H01L29/78 ,  H01L29/66 ,  H01L29/786 ,  H01L21/8234

CPC classification number: H01L29/7835 ,  H01L29/6656 ,  H01L29/66575 ,  H01L29/6659 ,  H01L29/7833 ,  H01L29/78624 ,  H01L29/66492

Abstract: A semiconductor device includes a substrate, a gate structure, source and drain regions, and first and second lightly doped drain (LDD) regions. The source and drain regions are spaced apart and formed in an active region of the substrate at opposite sides of the gate structure. The first LDD region surrounds one side surface and a bottom surface of the drain region and has a first junction depth. The second LDD region surrounds one side surface and a bottom surface of the source region and has a second junction depth less than the first junction depth. The gate structure includes a gate dielectric layer, a gate electrode, and gate spacers respectively disposed on opposite side walls of the gate dielectric layer and the gate electrode. One side wall of the gate dielectric layer and electrode is aligned with one side surface of the first LDD region.

公开(公告)号：US11950423B2

公开(公告)日：2024-04-02

申请号：US17306308

申请日：2021-05-03

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yongkyu Lee ,  Youngmok Kim ,  Changmin Jeon ,  Yongsang Jeong

IPC: H01L27/11573 ,  H01L23/00 ,  H01L25/00 ,  H01L25/065 ,  H01L25/18 ,  H10B41/27 ,  H10B41/41 ,  H10B43/27 ,  H10B43/40

CPC classification number: H10B43/40 ,  H01L24/08 ,  H01L24/80 ,  H01L25/0657 ,  H01L25/18 ,  H01L25/50 ,  H10B41/27 ,  H10B41/41 ,  H10B43/27 ,  H01L2224/08145 ,  H01L2224/80895 ,  H01L2224/80896 ,  H01L2924/1431 ,  H01L2924/14511

Abstract: A semiconductor device includes: a cell area including a cell substrate, a memory cell array, and a first bonding metal pad on the memory cell array, the memory cell array including a plurality of word lines stacked on the cell substrate and a plurality of bit lines on the plurality of word lines; and a peripheral circuit area having the cell area stacked thereon and including a peripheral circuit substrate, a plurality of circuits on the peripheral circuit substrate, and a second bonding metal pad bonded to the first bonding metal pad, wherein the plurality of circuits include: a plurality of planar channel transistors respectively including a channel along a top surface of the peripheral circuit substrate; and at least one recess channel transistor including a channel along a surface of a recess trench arranged in the peripheral circuit.

公开(公告)号：US20220085048A1

公开(公告)日：2022-03-17

申请号：US17306308

申请日：2021-05-03

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yongkyu Lee ,  Youngmok Kim ,  Changmin Jeon ,  Yongsang Jeong

IPC: H01L27/11573 ,  H01L25/065 ,  H01L25/18 ,  H01L23/00 ,  H01L25/00 ,  H01L27/11556 ,  H01L27/11529 ,  H01L27/11582

Abstract: A semiconductor device includes: a cell area including a cell substrate, a memory cell array, and a first bonding metal pad on the memory cell array, the memory cell array including a plurality of word lines stacked on the cell substrate and a plurality of bit lines on the plurality of word lines; and a peripheral circuit area having the cell area stacked thereon and including a peripheral circuit substrate, a plurality of circuits on the peripheral circuit substrate, and a second bonding metal pad bonded to the first bonding metal pad, wherein the plurality of circuits include: a plurality of planar channel transistors respectively including a channel along a top surface of the peripheral circuit substrate; and at least one recess channel transistor including a channel along a surface of a recess trench arranged in the peripheral circuit.