公开(公告)号：US20230060486A1

公开(公告)日：2023-03-02

申请号：US17748152

申请日：2022-05-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Changyun LEE ,  Myoungsoo KIM ,  Sangchul HAN ,  Daeman SEO

IPC: H05H1/46

Abstract: A plasma generator includes a coaxial tube assembly, a radio frequency (RF) electrode, and a feed including an inner circumferential surface that defines a first and second recesses at opposite, first and second ends of the feed. A first protrusion of the coaxial tube assembly is coupled to the first recess of the feed. A second protrusion of the coaxial tube assembly is coupled to the second recess of the feed. The feed includes first and second inner surfaces that define first and second insertion grooves in the inner circumferential surface at the first and second ends of the feed, respectively. First and second coil springs are at least partially within the first and second insertion grooves, respectively. The coaxial tube assembly, the RF electrode, and the feed provide an RF power transmission path based on the feed being coupled between the coaxial tube assembly and the RF electrode.