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公开(公告)号:US20210193683A1
公开(公告)日:2021-06-24
申请号:US17029475
申请日:2020-09-23
Applicant: Samsung Electronics Co., Ltd.
Inventor: Gi Young YANG , Hyeon Gyu YOU , Ga Room KIM , Jin Young LIM , In Gyum KIM , Hak Chul JUNG
IPC: H01L27/118 , G06F30/392 , G11C11/412 , G11C5/06 , H01L23/528 , H01L27/02
Abstract: An integrated circuit including a first active region and a second active region extending in a first direction and spaced apart from each other in a second direction intersecting the first direction; a power rail and a ground rail extending in the first direction and spaced apart from the first and second active regions and each other in the second direction; source/drain contacts extending in the second direction on at least a portion of the first or second active region, gate structures extending in the second direction and on at least a portion of the first and second active regions, a power rail configured to supply power through source/drain contact vias, and a ground rail configured to supply a ground voltage through source/drain contact vias.