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公开(公告)号:US20230000343A1
公开(公告)日:2023-01-05
申请号:US17586189
申请日:2022-01-27
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jin Yong KIM , Dae Hoon HAN , Wook Rae KIM , Myung Jun LEE , Gwang Sik PARK , Sung Ho JANG
Abstract: An optical measurement apparatus includes a light source unit generating and outputting light, a polarized light generating unit generating polarized light from the light, an optical system generating a pupil image of a measurement target, using the polarized light, a self-interference generating unit generating multiple beams that are split from the pupil image, and a detecting unit detecting a self-interference image generated by interference of the multiple beams with each other.