公开(公告)号：US20180190522A1

公开(公告)日：2018-07-05

申请号：US15628725

申请日：2017-06-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Bum-Soo KIM ,  Philwoong JUNG ,  Yoonmi LEE ,  Hangryong LIM ,  Manyoung SHIN ,  Young Hoon SON

IPC: H01L21/67 ,  H01L21/673

Abstract: A wafer carrier including a case having an opening at one end, slots disposed in the case and receiving wafers, and a wireless communication circuitry disposed on an inner sidewall of the case and configured to detect humidity of a gas contained in the case may be provided. The wireless communication circuitry may be further configured to compare the detected humidity with a threshold humidity predetermined, and transmit a first warning signal to an external host via wireless communication when the detected humidity is greater than the threshold humidity.