公开(公告)号：US20180190522A1

公开(公告)日：2018-07-05

申请号：US15628725

申请日：2017-06-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Bum-Soo KIM ,  Philwoong JUNG ,  Yoonmi LEE ,  Hangryong LIM ,  Manyoung SHIN ,  Young Hoon SON

IPC: H01L21/67 ,  H01L21/673

Abstract: A wafer carrier including a case having an opening at one end, slots disposed in the case and receiving wafers, and a wireless communication circuitry disposed on an inner sidewall of the case and configured to detect humidity of a gas contained in the case may be provided. The wireless communication circuitry may be further configured to compare the detected humidity with a threshold humidity predetermined, and transmit a first warning signal to an external host via wireless communication when the detected humidity is greater than the threshold humidity.

公开(公告)号：US20160372386A1

公开(公告)日：2016-12-22

申请号：US15142275

申请日：2016-04-29

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kiwook SONG ,  Bum-Soo KIM ,  Kye Hyun BAEK ,  MASAYUKI TOMOYASU ,  Eunwoo LEE ,  JONG SEO HONG

IPC: H01L21/66 ,  B08B9/46 ,  G01N21/73 ,  B08B9/08

CPC classification number: H01L22/10 ,  G05B19/41875 ,  G05B2219/32234 ,  G05B2219/45031 ,  H01J37/3288 ,  H01J37/32972

Abstract: Provided are substrate processing systems and methods of managing the same. The method may include displaying a notification for a preventive maintenance operation on a chamber, performing a maintenance operation on the chamber, performing a first optical test, and evaluating the preventive maintenance operation. The first optical test may include generating a reference plasma reaction, measuring a variation of intensity by wavelength for plasma light emitted from the reference plasma reaction, and calculating an electron density and an electron temperature from a ratio in intensity of the plasma light.

Abstract translation: 提供了基板处理系统及其管理方法。 该方法可以包括在室上显示用于预防性维护操作的通知，在腔室上执行维护操作，执行第一光学测试以及评估预防性维护操作。 第一光学测试可以包括产生参考等离子体反应，测量从参考等离子体反应发射的等离子体光的波长的强度变化，以及根据等离子体光的强度的比率计算电子密度和电子温度。

公开(公告)号：US20200051790A1

公开(公告)日：2020-02-13

申请号：US16252875

申请日：2019-01-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kyu-Chul SHIM ,  Min-Kyu KANG ,  Bum-Soo KIM ,  Yong-Soo KIM ,  Hee-Jung KIM ,  Dae-Gyu BAN ,  Kyoung-Soo LEE ,  Jong-Sang LEE ,  Hyo-Il CHOI

IPC: H01J37/32 ,  H01L21/683 ,  H01L21/67 ,  C23C16/50 ,  C23C16/44

Abstract: A plasma processing apparatus includes a plasma chamber, an electrostatic chuck disposed in the plasma chamber and a pressure control ring disposed in the plasma chamber. The pressure control ring includes a body surrounding an electrostatic chuck in a plan view, an exhaust part disposed in a portion of the body along a first direction, the exhaust part configured to induce a flow of gas in the plasma chamber toward the first direction in a plan view, and a blocking part disposed in another portion of the body along a second direction perpendicular to the first direction in a plan view, the blocking part configured to block the flow of the gas in the second direction.

公开(公告)号：US20150054054A1

公开(公告)日：2015-02-26

申请号：US14536250

申请日：2014-11-07

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sung-Soo AHN ,  O Ik KWON ,  Bum-Soo KIM ,  Hyun-Sung KIM ,  Kyoung-Sub SHIN ,  Min-Kyung YUN ,  Seung-Pil CHUNG ,  Won-Bong JUNG

IPC: H01L29/788 ,  H01L29/423

CPC classification number: H01L29/7883 ,  H01L21/7682 ,  H01L27/11521 ,  H01L29/42324 ,  H01L29/42364 ,  H01L29/66825 ,  H01L29/7881

Abstract: A method of manufacturing a semiconductor device, the method including forming a tunnel insulating layer on an upper surface of a substrate, forming gate patterns on an upper surface of the tunnel insulating layer, forming capping layer patterns on sidewalls of the gate patterns and on the upper surface of the tunnel insulating layer, etching a portion of the tunnel insulating layer that is not covered with the gate patterns or the capping layer patterns to form a tunnel insulating layer pattern, and forming a first insulating layer on the upper surface of the substrate to cover the gate patterns, the capping layer patterns, and the tunnel insulating layer pattern, wherein the first insulating layer has an air gap between the capping layer patterns.

Abstract translation: 一种制造半导体器件的方法，所述方法包括在衬底的上表面上形成隧道绝缘层，在隧道绝缘层的上表面上形成栅极图案，在栅极图案的侧壁上形成覆盖层图案，并且在 隧道绝缘层的上表面，蚀刻未被栅极图案或覆盖层图案覆盖的隧道绝缘层的一部分以形成隧道绝缘层图案，并且在衬底的上表面上形成第一绝缘层 以覆盖栅极图案，覆盖层图案和隧道绝缘层图案，其中第一绝缘层在封盖层图案之间具有气隙。

公开(公告)号：US20130179829A1

公开(公告)日：2013-07-11

申请号：US13736256

申请日：2013-01-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Eun-Suk KWON ,  Gun-Su LEE ,  Bum-Soo KIM

IPC: G06F3/0485

CPC classification number: G06F3/0485 ,  G06F3/0488

Abstract: A method and apparatus for facilitating scrolling of items on a display screen of an electronic device are provided. A first number of scrollable items representing a portion of a set of displayable items are displayed on the display screen. An input command for performing an “easy scroll function” is then detected. In response to the detected input command, the display screen is divided into a predetermined number of divided display screens, each independently scrollable and each displaying a respective number of items of the set of items, according to a display setting therefor. Each divided display screen may display a different number of items and may be scrollable at a different rate.

Abstract translation: 提供一种便于在电子设备的显示屏幕上滚动物品的方法和装置。 表示一组可显示项目的一部分的可滚动项目的第一数量被显示在显示屏幕上。 然后检测用于执行“容易滚动功能”的输入命令。 响应于检测到的输入命令，显示屏幕被划分成预定数量的划分的显示屏幕，每个显示屏幕根据其显示设置可独立地滚动并且各自显示该组项目的相应数量的项目。 每个划分的显示屏幕可以显示不同数量的项目，并且可以以不同的速率滚动。

公开(公告)号：US20130134221A1

公开(公告)日：2013-05-30

申请号：US13653683

申请日：2012-10-17

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Gun-Su LEE ,  Bum-Soo KIM

IPC: G06K7/12

CPC classification number: G06K7/12 ,  G06K7/1447

Abstract: An apparatus and method for acquiring a code image in a portable terminal includes an image recognizing unit for acquiring a picture including the code image and a code analyzing unit for verifying color information items for pixels with respect to the acquired picture, deleting a certain color information item according to a predetermined scheme when there are a plurality of color information items in order to recognize the code image having at least one of a QR code and a bar code.

Abstract translation: 一种用于在便携式终端中获取代码图像的装置和方法包括：图像识别单元，用于获取包括代码图像的图像;以及代码分析单元，用于验证相对于所获取的图像的像素的颜色信息项，删除某个颜色信息 当存在多个颜色信息项目以便识别具有QR码和条形码中的至少一个的代码图像时，根据预定方案的项目。