公开(公告)号：US20250149317A1

公开(公告)日：2025-05-08

申请号：US18658293

申请日：2024-05-08

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yunha Kim ,  Kwanghyun Cho ,  Jonghwa Kim ,  Sanghoon Kim ,  Hansung Cho

IPC: H01J37/32

Abstract: A method of controlling a physical quantity of a semiconductor manufacturing facility includes performing feedforward control including control of a first stage feedforward to accelerate a physical quantity control system to a physical limit performance and control of a second stage feedforward to reduce acceleration of the physical quantity control system at a first switching point, switching the feedforward control to feedback control at a second switching point, and performing feedback control on the physical quantity control system.