公开(公告)号：US20220037385A1

公开(公告)日：2022-02-03

申请号：US17218662

申请日：2021-03-31

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sunyoung BANG ,  SEUNGJOO NAH ,  Hoemin JEONG ,  HEEGEUN JEONG

IPC: H01L27/146

Abstract: An image sensor includes: a substrate having a first surface and a second surface that are opposite to each other; a plurality of color filters on the substrate; a fence pattern between adjacent color filters of the plurality of color filters; and a protective layer between the substrate and the plurality of color filters, wherein the protective layer covers the fence pattern. The fence pattern includes: a first fence pattern having a first bottom surface and a first top surface that are opposite to each other; and a second fence pattern on the first top surface of the first fence pattern. A width at the first bottom surface of the first fence pattern is less than a width of the second fence pattern, and the protective layer covers a sidewall of the first fence pattern.

公开(公告)号：US20230420476A1

公开(公告)日：2023-12-28

申请号：US18342376

申请日：2023-06-27

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hoemin JEONG ,  Seungjoo NAH ,  Heegeun JEONG ,  Soongeul CHOI ,  Dongmin HAN

IPC: H01L27/146

CPC classification number: H01L27/14636 ,  H01L27/14621 ,  H01L27/14627 ,  H01L27/14685

Abstract: An image sensor includes a chip structure including first and second regions. The chip structure further includes a substrate having a first surface, a second surface, and a recess portion, a plurality of photoelectric conversion devices included in the substrate, at least one conductive layer on a sidewall and a bottom surface of the recess portion and on the horizontal insulating layer in the second region, a first passivation layer on a side surface of the conductive layer in the recess portion and the conductive layer on the horizontal insulating layer, and a second passivation layer on side surface of the first passivation layer in the recess portion.