公开(公告)号：US20230129083A1

公开(公告)日：2023-04-27

申请号：US17876064

申请日：2022-07-28

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jinho SO ,  Kwangiun KIM ,  Chigun AN ,  Huigwan LEE ,  Hyungho CHOI ,  Junhyong LEE

IPC: F17C13/02 ,  G01L5/00 ,  G01P15/00 ,  G01C9/00 ,  B66F9/06

Abstract: A gas cylinder automation system may include: a transfer path automatically supply gas in a gas cylinder brought into the gas cylinder automation system to a semiconductor process line; and a cylinder-type sensor checking whether the transfer path is abnormal by moving along the transfer path, wherein the cylinder-type sensor includes: a cylinder head including an end cap fastening member and an end cap coupled to the end cap fastening member and having a first detecting sensor disposed on the end cap fastening member to detect one of a force or torque applied to the end cap and a cylinder body connected to the cylinder head and having a second detecting sensor including at least one of an acceleration sensor or an inclination sensor mounted thereon.

公开(公告)号：US20230009496A1

公开(公告)日：2023-01-12

申请号：US17677452

申请日：2022-02-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Minyoung KIM ,  Kwangjun KIM ,  Kyeongsup BYEON ,  Byungjun AN ,  Huigwan LEE ,  Byeongchan JEONG ,  Hyungho CHOI

IPC: F17C13/06 ,  F17C13/04

Abstract: An end cap holder may include a base block and a holding block. The base block may be configured to provide an end cap, which may be at a nozzle of the gas cylinder, with a torque for combining/separating the end cap with/from the nozzle. An angle correction groove may be formed at a first surface of the base block oriented toward the end cap. The holding block may be rotatably receivable in the angle correction groove to hold the end cap. The holding block may selectively make point contact with the base block to transmit the torque of the base block to the end cap. Thus, the holding block may accurately hold the end cap tilted to a vertical axis or a horizontal axis.