公开(公告)号：US20230129083A1

公开(公告)日：2023-04-27

申请号：US17876064

申请日：2022-07-28

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jinho SO ,  Kwangiun KIM ,  Chigun AN ,  Huigwan LEE ,  Hyungho CHOI ,  Junhyong LEE

IPC: F17C13/02 ,  G01L5/00 ,  G01P15/00 ,  G01C9/00 ,  B66F9/06

Abstract: A gas cylinder automation system may include: a transfer path automatically supply gas in a gas cylinder brought into the gas cylinder automation system to a semiconductor process line; and a cylinder-type sensor checking whether the transfer path is abnormal by moving along the transfer path, wherein the cylinder-type sensor includes: a cylinder head including an end cap fastening member and an end cap coupled to the end cap fastening member and having a first detecting sensor disposed on the end cap fastening member to detect one of a force or torque applied to the end cap and a cylinder body connected to the cylinder head and having a second detecting sensor including at least one of an acceleration sensor or an inclination sensor mounted thereon.