公开(公告)号：US20190188840A1

公开(公告)日：2019-06-20

申请号：US16032356

申请日：2018-07-11

Applicant: Samsung Electronics Co., Ltd.

Inventor： Namyeong Kwon ,  Hyohyeong Kang ,  Yongdeok Kim

IPC: G06T7/00 ,  G06N3/08 ,  H01L21/66 ,  G01N21/95 ,  G01N21/956 ,  H01L21/67 ,  G06K9/62

Abstract: A semiconductor defect classification device includes feature extractors that are configured to receive images of semiconductor patterns on a wafer and to extract features of the images from the images, and a classifier that is configured to receive the features of the images and first meta information about the wafer and to use machine learning to classify a defect of the semiconductor patterns associated with the images based on the features of the images and the first meta information.

公开(公告)号：US11488013B2

公开(公告)日：2022-11-01

申请号：US16562783

申请日：2019-09-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hwidong Na ,  Hyohyeong Kang ,  Hogyeong Kim ,  Hoshik Lee

IPC: G06N3/08

Abstract: A model training method and apparatus is disclosed, where the model training method acquires a recognition result of a teacher model and a recognition result of a student model for an input sequence and trains the student model such that the recognition result of the teacher model and the recognition result of the student model are not distinguished from each other.

公开(公告)号：US11727275B2

公开(公告)日：2023-08-15

申请号：US17950521

申请日：2022-09-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hwidong Na ,  Hyohyeong Kang ,  Hogyeong Kim ,  Hoshik Lee

IPC: G06N3/08

CPC classification number: G06N3/08

Abstract: A model training method and apparatus is disclosed, where the model training method acquires a recognition result of a teacher model and a recognition result of a student model for an input sequence and trains the student model such that the recognition result of the teacher model and the recognition result of the student model are not distinguished from each other.

公开(公告)号：US11244671B2

公开(公告)日：2022-02-08

申请号：US16549236

申请日：2019-08-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hogyeong Kim ,  Hyohyeong Kang ,  Hwidong Na ,  Hoshik Lee

IPC: G10L15/00 ,  G10L15/06 ,  G10L15/16 ,  G06N3/08

Abstract: A model training method and apparatus is disclosed, where the model training method acquires first output data of a student model for first input data and second output data of a teacher model for second input data and trains the student model such that the first output data and the second output data are not distinguished from each other. The student model and the teacher model have different structures.

公开(公告)号：US10713778B2

公开(公告)日：2020-07-14

申请号：US16032356

申请日：2018-07-11

Applicant: Samsung Electronics Co., Ltd.

Inventor： Namyeong Kwon ,  Hyohyeong Kang ,  Yongdeok Kim

IPC: G06T7/00 ,  G06N3/08 ,  H01L21/66 ,  G01N21/95 ,  G06K9/62 ,  G01N21/956 ,  H01L21/67 ,  G01N21/88

Abstract: A semiconductor defect classification device includes feature extractors that are configured to receive images of semiconductor patterns on a wafer and to extract features of the images from the images, and a classifier that is configured to receive the features of the images and first meta information about the wafer and to use machine learning to classify a defect of the semiconductor patterns associated with the images based on the features of the images and the first meta information.