Bubble-jet type ink-jet printhead, manufacturing method thereof, and ink ejection method
    1.
    发明申请
    Bubble-jet type ink-jet printhead, manufacturing method thereof, and ink ejection method 失效
    喷墨式喷墨打印头,其制造方法和喷墨方法

    公开(公告)号:US20030038862A1

    公开(公告)日:2003-02-27

    申请号:US10255758

    申请日:2002-09-27

    Abstract: A bubble-jet type ink-jet printhead, a manufacturing method thereof and a method of ejecting ink, wherein, in the printhead, a manifold supplying ink, a hemispherical ink chamber, and an ink channel for connecting the manifold with the ink chamber are integrally formed on the substrate. A nozzle plate on the substrate having a nozzle, and a heater formed in an annular shape and centered around the nozzle are integrated without a complex process such as bonding. Thus, this simplifies the manufacturing process and facilitates high volume production. Furthermore, according to the ink ejection method, a doughnut-shaped bubble is formed to eject ink, thereby preventing a back flow of ink as well as formation of satellite droplets that may degrade image resolution.

    Abstract translation: 一种气泡喷墨式喷墨打印头,其制造方法和喷墨方法,其中,在打印头中,供应墨水的歧管,半球形墨水室和用于连接歧管与墨水腔的墨水通道 一体地形成在基板上。 在具有喷嘴的基板上的喷嘴板和形成为环形并且以喷嘴为中心的加热器一体化,而不需要诸如粘合的复杂工艺。 因此,这简化了制造过程并且有助于大批量生产。 此外,根据喷墨方法,形成环形气泡以喷射墨水,从而防止墨水的反向流动以及可能降低图像分辨率的卫星墨滴的形成。

    Bubble-jet type ink-jet printhead and manufacturing method thereof
    3.
    发明申请
    Bubble-jet type ink-jet printhead and manufacturing method thereof 有权
    喷气式喷墨打印头及其制造方法

    公开(公告)号:US20020008738A1

    公开(公告)日:2002-01-24

    申请号:US09907456

    申请日:2001-07-18

    Abstract: A bubble-jet type ink-jet printhead, and a manufacturing method thereof are provided, wherein, the printhead includes a substrate integrally having an ink supply manifold, an ink chamber, and an ink channel, a nozzle plate having a nozzle, a heater consisting of resistive heating elements, and an electrode for applying current to the heater. In particular, the ink chamber is formed in a substantially hemispherical shape on a surface of the substrate, a manifold is formed from its bottom side toward the ink chamber, and the ink channel linking the manifold and the ink chamber is formed at the bottom of the ink chamber. Thus, this simplifies the manufacturing process and facilitates high integration and high volume production. Furthermore, a doughnut-shaped bubble is formed to eject ink in the printhead, thereby preventing a back flow of ink as well as formation of satellite droplets that may degrade image resolution.

    Abstract translation: 提供一种气泡喷墨式喷墨打印头及其制造方法,其中,打印头包括一体地具有供墨歧管,墨水室和墨水通道的基板,具有喷嘴的喷嘴板,加热器 由电阻加热元件和用于向加热器施加电流的电极组成。 特别地,墨水室在基板的表面上形成为大致半球形状,从其底侧朝向墨水室形成歧管,并且连接歧管和墨水室的墨水通道形成在 墨水室。 因此,这简化了制造工艺,并且促进了高集成度和大批量生产。 此外,形成环形气泡以在打印头中喷射墨水,从而防止墨水的反向流动以及可能降低图像分辨率的卫星墨滴的形成。

    Monolithic nozzle assembly formed with mono-crystalline silicon wafer and method for manufacturing the same
    4.
    发明申请
    Monolithic nozzle assembly formed with mono-crystalline silicon wafer and method for manufacturing the same 失效
    用单晶硅晶片形成的单片喷嘴组件及其制造方法

    公开(公告)号:US20010028378A1

    公开(公告)日:2001-10-11

    申请号:US09790714

    申请日:2001-02-23

    Abstract: A monolithic nozzle assembly for fluid, and a method for manufacturing the same with a single mono-crystalline silicon wafer by continuous self-alignment are provided. The monolithic nozzle assembly can be formed with a single (100) monocrystalline silicon wafer. Compared with a complicated nozzle assembly formed using a great number of silicon wafers and plates, the configuration of the monolithic nozzle assembly is simple, and can be manufactured on a mass production scale by semiconductor manufacturing processes. The monolithic nozzle assembly can be manufactured by continuous self-alignment, including anisotropic etching using the characteristic of the crystal plane of silicon, and LOCOS-based masking. Compared with a common photolithography process, the alignment error may be reduced below a few microns. The overall manufacturing process is simple and efficient with a high yield.

    Abstract translation: 提供了用于流体的单片式喷嘴组件及其通过连续自对准用单个单晶硅晶片制造该方法。 单片喷嘴组件可以由单个(100)单晶硅晶片形成。 与使用大量硅晶片和板形成的复杂喷嘴组件相比,单片喷嘴组件的构造简单,并且可以通过半导体制造工艺在大规模生产规模上制造。 单片喷嘴组件可以通过连续自对准(包括使用硅的晶面的特性的各向异性蚀刻)和基于LOCOS的掩模来制造。 与普通光刻工艺相比,对准误差可能会降低到几微米以下。 整体制造工艺简单高效,成品率高。

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