公开(公告)号：US20130216336A1

公开(公告)日：2013-08-22

申请号：US13670197

申请日：2012-11-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jae-Nam LEE ,  In-Cheol KIM ,  Jong-Hoon KIM ,  Hee-Sang YANG ,  Yu-Dong WON ,  Sung-Yeol LEE ,  Jong-In LEE ,  Min-Gu CHANG ,  Woo-Chul JEON

IPC: H01L21/677

CPC classification number: H01L21/67733

Abstract: A carrier transfer for automatically transferring a substrate carrier includes a gripper detachably coupled to the substrate carrier, the substrate carrier including a plurality of substrates and at least one open gate through which the plurality of substrates are loaded into or unloaded from the substrate carrier. The gripper includes a gate blocking unit secured to the gripper and configured to shift to a blocking position, the blocking position being a position of the gate blocking unit that partially blocks the gate to prevent the plurality of substrates from being separated from the substrate carrier during the automatic transferring of the substrate carrier.

Abstract translation: 用于自动转移衬底载体的载体传输器包括可拆卸地联接到衬底载体的夹持器，衬底载体包括多个衬底和至少一个开放栅极，多个衬底通过该至少一个开放栅极被载入衬底载体或从衬底载体卸载。 夹持器包括固定到夹持器并被配置为移动到阻挡位置的闸板阻挡单元，阻挡位置是栅极阻挡单元的部分地阻挡栅极的位置，以防止多个基板与基板载体分离 基板载体的自动传送。