Abstract:
Provided are an overhead hoist transfer system and a factory system employing the same. The factory system includes a rail attached to a ceiling of a factory. An overhead hoist transfer system, in which a first carrier configured to receive a first material and a second carrier configured to receive a second material may be suspended and moved along the rail, is provided. A processing device system including a first carrier port in which the first carrier may be seated, a first device gate through which the first material may pass, a second carrier port in which the second carrier may be seated, and a second device gate through which the second material may pass, is provided. The processing device system may be adjacent to the rail. The overhead hoist transfer system includes a grip unit configured to grip the first carrier or the second carrier, and a rotating unit configured to rotate the grip unit.
Abstract:
A carrier transfer for automatically transferring a substrate carrier includes a gripper detachably coupled to the substrate carrier, the substrate carrier including a plurality of substrates and at least one open gate through which the plurality of substrates are loaded into or unloaded from the substrate carrier. The gripper includes a gate blocking unit secured to the gripper and configured to shift to a blocking position, the blocking position being a position of the gate blocking unit that partially blocks the gate to prevent the plurality of substrates from being separated from the substrate carrier during the automatic transferring of the substrate carrier.