OVERHEAD HOIST TRANSFER SYSTEM AND FACTORY SYSTEM EMPLOYING THE SAME
    1.
    发明申请
    OVERHEAD HOIST TRANSFER SYSTEM AND FACTORY SYSTEM EMPLOYING THE SAME 审中-公开
    使用它的超大型转移系统和工厂系统

    公开(公告)号:US20150329334A1

    公开(公告)日:2015-11-19

    申请号:US14637507

    申请日:2015-03-04

    CPC classification number: H01L21/68707 B25J11/0095 B66C19/00 H01L21/67733

    Abstract: Provided are an overhead hoist transfer system and a factory system employing the same. The factory system includes a rail attached to a ceiling of a factory. An overhead hoist transfer system, in which a first carrier configured to receive a first material and a second carrier configured to receive a second material may be suspended and moved along the rail, is provided. A processing device system including a first carrier port in which the first carrier may be seated, a first device gate through which the first material may pass, a second carrier port in which the second carrier may be seated, and a second device gate through which the second material may pass, is provided. The processing device system may be adjacent to the rail. The overhead hoist transfer system includes a grip unit configured to grip the first carrier or the second carrier, and a rotating unit configured to rotate the grip unit.

    Abstract translation: 提供了一种高架升降机输送系统和采用该系统的工厂系统。 工厂系统包括连接到工厂天花板的轨道。 提供了一种架空式起重机转移系统,其中构造成接收第一材料的第一承载件和构造成接收第二材料的第二承载件可以沿着导轨悬挂和移动。 一种处理装置系统,包括第一承运人口,第一承运人可以坐在其中;第一装置门,第一材料可以穿过第一装置门;第二承运口,第二承运人可以坐在其中;第二装置门, 第二种材料可以通过。 处理装置系统可以与轨道相邻。 所述高架升降机输送系统包括构造成夹持所述第一行星架或所述第二行星架的把手单元,以及构造成旋转所述手柄单元的旋转单元。

    AUTOMATIC CARRIER TRANSFER FOR TRANSFERRING A SUBSTRATE CARRIER IN A SEMICONDUCTOR MANUFACTURING POST-PROCESS AND METHOD OF TRANSFERRING THE SUBSTRATE CARRIER USING THE SAME
    2.
    发明申请
    AUTOMATIC CARRIER TRANSFER FOR TRANSFERRING A SUBSTRATE CARRIER IN A SEMICONDUCTOR MANUFACTURING POST-PROCESS AND METHOD OF TRANSFERRING THE SUBSTRATE CARRIER USING THE SAME 有权
    用于在半导体制造后处理中传输基板载体的自动载波传送和使用该传输的基板载波的方法

    公开(公告)号:US20130216336A1

    公开(公告)日:2013-08-22

    申请号:US13670197

    申请日:2012-11-06

    CPC classification number: H01L21/67733

    Abstract: A carrier transfer for automatically transferring a substrate carrier includes a gripper detachably coupled to the substrate carrier, the substrate carrier including a plurality of substrates and at least one open gate through which the plurality of substrates are loaded into or unloaded from the substrate carrier. The gripper includes a gate blocking unit secured to the gripper and configured to shift to a blocking position, the blocking position being a position of the gate blocking unit that partially blocks the gate to prevent the plurality of substrates from being separated from the substrate carrier during the automatic transferring of the substrate carrier.

    Abstract translation: 用于自动转移衬底载体的载体传输器包括可拆卸地联接到衬底载体的夹持器,衬底载体包括多个衬底和至少一个开放栅极,多个衬底通过该至少一个开放栅极被载入衬底载体或从衬底载体卸载。 夹持器包括固定到夹持器并被配置为移动到阻挡位置的闸板阻挡单元,阻挡位置是栅极阻挡单元的部分地阻挡栅极的位置,以防止多个基板与基板载体分离 基板载体的自动传送。

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