公开(公告)号：US09507272B2

公开(公告)日：2016-11-29

申请号：US15014746

申请日：2016-02-03

Applicant: Samsung Electronics Co., Ltd.

Inventor： Ja Yul Kim ,  Sang Don Jang ,  Tae Kyu Son

IPC: H01L21/68 ,  G03F7/20

CPC classification number: G03F7/707 ,  G03F7/70775 ,  H01L21/681 ,  Y10T29/49998 ,  Y10T29/53013 ,  Y10T29/53022 ,  Y10T29/53052 ,  Y10T29/53061 ,  Y10T29/53087 ,  Y10T29/53091 ,  Y10T279/21

Abstract: Exemplary embodiments of the invention disclose an exposure apparatus and a method of tuning parameters of a chuck, which may reduce a time taken to level the chuck by previously tuning parameters of the chuck. The method of tuning parameters of a chuck includes detecting a tilt component of the chuck, performing chuck tilt adjustment to minimize the tilt component of the chuck, and tuning the parameters of the chuck if a residual tilt component is present after performing the chuck tilt adjustment.

Abstract translation: 本发明的示例性实施例公开了一种调整卡盘参数的曝光装置和方法，其可以通过预先调谐卡盘的参数来减少卡盘水准所需的时间。 调整卡盘的参数的方法包括检测卡盘的倾斜分量，执行卡盘倾斜调整以最小化卡盘的倾斜分量，以及如果在执行卡盘倾斜调整之后存在剩余倾斜分量，则调整卡盘的参数 。