公开(公告)号：US11087972B2

公开(公告)日：2021-08-10

申请号：US16503751

申请日：2019-07-05

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hyun Joon Park ,  Jin Yong Kim ,  Bong Ki Park ,  Eun Sun Park ,  Jae Hyeon Seo ,  Young Chul Lee

IPC: H01L21/02 ,  H01L21/67 ,  H01L21/687 ,  H01L21/677

Abstract: Provided are a cleaning device and a method for driving the cleaning device which cleans a wafer after chemical mechanical polishing. The cleaning device includes a cleaning modules and a running beam, the running beam including a first blade and a second blade to insert or remove the wafer with respect to one of the cleaning modules in a second direction, the first blade and the second blade being fixed to the running beam and movable in the second direction, and the cleaning modules including an input module, a megasonic module, a first brush module, a second brush module and a drying module. The driving method includes performing an operation of inserting or removing the wafer in the second direction using the first blade in a first area; and performing an operation of inserting or removing the wafer in the second direction using the second blade in a second area.

公开(公告)号：US20140229899A1

公开(公告)日：2014-08-14

申请号：US14255881

申请日：2014-04-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Chang Soo Lee ,  Jae Hyeon Seo

IPC: G06F3/0481 ,  G06F3/0484 ,  G06F3/0482

CPC classification number: G06F3/04817 ,  G06F3/0482 ,  G06F3/0484 ,  G06F3/0488 ,  H04M1/274558 ,  H04M1/67 ,  H04M1/677 ,  H04M1/72583 ,  H04M2250/22

Abstract: A mobile device and a method support a touch semi-lock state. When entering into the touch semi-lock state, a predefined hot menu including items and a touch-lock icon are provided on a touch screen. An output area of the touch-lock icon on the touch screen is defined as a touch event allowable region. A specific item of the hot menu is selected in response to a user input that moves the touch-lock icon onto the specific item. A particular end-user function corresponding to the selected item is activated.

Abstract translation: 移动设备和方法支持触摸半锁状态。 当进入触摸半锁定状态时，在触摸屏上提供包括项目和触摸锁定图标的预定义热菜单。 触摸屏上的触摸锁定图标的输出区域被定义为触摸事件允许区域。 响应于将触摸锁定图标移动到特定项目上的用户输入，选择热菜单的特定项目。 对应于所选项目的特定终端用户功能被激活。