公开(公告)号：US20250021025A1

公开(公告)日：2025-01-16

申请号：US18659932

申请日：2024-05-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Youngho HWANG ,  Sanghyun LIM ,  Youngkyun IM ,  Jaehong LIM ,  Chulmin CHO ,  Seok HEO

IPC: G03F7/00 ,  G03F7/16 ,  G03F7/32

Abstract: A substrate processing method includes: performing a first post-exposure baking process on a photoresist layer that was previously exposed to for extreme ultraviolet (EUV) exposed to EUV; developing the photoresist layer using a first developing solution having a first temperature; performing a second post-exposure baking process on the photoresist layer; developing the photoresist layer using a second developing solution having a second temperature, higher than the first temperature; and forming a photoresist pattern by performing a hard baking process on the photoresist layer.

公开(公告)号：US20240192604A1

公开(公告)日：2024-06-13

申请号：US18216028

申请日：2023-06-29

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jaehong LIM ,  Youngho HWANG ,  Byungjo KIM ,  Sangki NAM ,  Suyoung YOO ,  Sanghyun LIM ,  Youngkyun IM ,  Hyungkyu CHOI ,  Seok HEO

IPC: G03F7/40

CPC classification number: G03F7/40

Abstract: A post baking apparatus comprising a baking chamber configured to receive a substrate with an exposed photoresist film, a lower heater in the baking chamber under the substrate to heat the exposed photoresist film, an applier applying an electric field or a magnetic field to the exposed photoresist film along a vertical direction, which is substantially perpendicular to an upper surface of the exposed photoresist film, to control diffusions of an acid or a secondary electron, which are generated from the exposed photoresist film, along a horizontal direction, and a controller configured to control an operation of the applier.

公开(公告)号：US20160124603A1

公开(公告)日：2016-05-05

申请号：US14928426

申请日：2015-10-30

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jongin PARK ,  Changhyeon MUN ,  Jaehong LIM

IPC: G06F3/0488 ,  G06F3/16 ,  G06F3/01 ,  H04W76/02

CPC classification number: G06F3/0488 ,  G06F3/016 ,  H04M1/026 ,  H04M1/7253 ,  H04M1/72569 ,  H04W76/14

Abstract: Embodiments of the present disclosure relate to an electronic device including a tactile sensor, an operating method thereof, and a system. The electronic device may include: at least one tactile sensor that is located on a side of the electronic device and provides a sense of touch; a display unit that displays content; and a controller that controls the at least one tactile sensor to provide a sense of touch relevant to the content.

Abstract translation: 本公开的实施例涉及一种包括触觉传感器，其操作方法和系统的电子设备。 电子设备可以包括：位于电子设备侧面并提供触觉的至少一个触觉传感器; 显示内容的显示单元; 以及控制器，其控制所述至少一个触觉传感器以提供与所述内容相关的触摸感。

公开(公告)号：US20250031281A1

公开(公告)日：2025-01-23

申请号：US18389721

申请日：2023-12-19

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sanghyun LIM ,  Youngho HWANG ,  Juno PARK ,  Kyoungwhan OH ,  Youngkyun IM ,  Jaehong LIM ,  Chulmin CHO ,  Seok HEO

IPC: H05B3/26 ,  G03F7/00

Abstract: A substrate supporting member and a substrate processing apparatus including the same are provided. The substrate supporting member includes a plate having at least one heating zone. A heating member is on a first surface of the plate and located in the at least one heating zone. The heating member extends along a circumferential direction of the plate and is configured to heat a substrate supported by the plate. A first electrode is on the first surface of the plate and is connected to an inner side surface of the heating member. A second electrode is on the first surface of the plate and is connected to an outer side surface of the heating member. The heating member has a stair-step configuration such that a thickness of the heating member increases from the second electrode toward the first electrode.