公开(公告)号：US20230408905A1

公开(公告)日：2023-12-21

申请号：US18299301

申请日：2023-04-12

Applicant: Samsung Electronics Co., Ltd.

Inventor： Mun Ja KIM ,  Ki Bong NAM ,  Jin Ho YEO ,  Byungchul YOO ,  Ji Beom YOO ,  Changyoung JEONG

IPC: G03F1/62

CPC classification number: G03F1/62

Abstract: A method of manufacturing a pellicle for an extreme ultraviolet exposure includes forming a graphite-containing layer on a catalyst substrate; surface-treating a first surface of the graphite-containing layer to form a first treatment layer; and forming a first passivation layer on the first treatment layer, wherein the forming of the first treatment layer includes removing a C—O—C bond included in the graphite-containing layer through the surface-treating of the first surface.