公开(公告)号：US11193970B2

公开(公告)日：2021-12-07

申请号：US16561741

申请日：2019-09-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seon-Mi Lee ,  Sung Jin Kim ,  Ja-Hwan Ku ,  Jae-Hyun Kim ,  Gilho Lee ,  Dahm Yu ,  Jonghyun Lim

IPC: G01R31/26

Abstract: Disclosed are a test chamber and a test apparatus having the same. The test chamber includes a test compartment configured to support a plurality of test boards, each being configured to secure a test object. The test chamber applies a test signal to the test object. The test chamber includes an inlet side and a discharge side, and a supply duct vertically extending along a height of the test compartment. The supply duct supplies the inlet side of the test compartment with the test fluid. The test chamber includes a fluid controller to uniformly control a distribution of a test fluid in the supply duct and uniformly supply the test compartment with the test fluid. The disclosed test chamber and test apparatus provide a uniform test temperature and thereby improve a test reliability of a test object such as a semiconductor or semiconductor package.