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    Apparatus for creating an extreme ultraviolet light, an exposing apparatus including the same, and electronic devices manufactured using the exposing apparatus
    1.
    发明授权
    Apparatus for creating an extreme ultraviolet light, an exposing apparatus including the same, and electronic devices manufactured using the exposing apparatus 有权
    用于产生极紫外光的装置，包括该装置的曝光装置以及使用该曝光装置制造的电子装置

    公开(公告)号：US09057954B2

    公开(公告)日：2015-06-16

    申请号：US13940784

    申请日：2013-07-12

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Chang-Min Park ,  Joo-On Park ,  Jeong-Ho Yeo

    IPC: G03F7/20 ,  H05G2/00

    CPC classification number: G03F7/2006 ,  G03F7/20 ,  G03F7/70025 ,  G03F7/70916 ,  H05G2/003 ,  H05G2/006 ,  H05G2/008

    Abstract: An apparatus for creating an EUV light may include a droplet-supplying unit, a laser-irradiating unit, a light-concentrating unit and a guiding unit. The droplet-supplying unit may supply a droplet from which the EUV light may be created. The laser-irradiating unit may irradiate a laser to the droplet supplied from the droplet-supplying unit to create the EUV light. The light-concentrating unit may concentrate the EUV light created by the laser-irradiating unit. The guiding unit may guide the droplet to a position at which the laser may be irradiated. The guiding unit may have at least one gas-spraying hole for spraying a gas to a space between the droplet-supplying unit and the laser irradiation position to form a gas curtain configured to surround the droplet.

    Abstract translation: 用于产生EUV光的装置可以包括液滴供给单元，激光照射单元，光聚集单元和引导单元。 液滴供给单元可以供应可以从其产生EUV光的液滴。 激光照射单元可以将激光照射到从液滴供给单元提供的液滴以产生EUV光。 光聚集单元可以集中由激光照射单元产生的EUV光。 引导单元可以将液滴引导到可以照射激光的位置。 引导单元可以具有用于将气体喷射到液滴供应单元和激光照射位置之间的空间的至少一个气体喷射孔，以形成围绕液滴的气幕。

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