公开(公告)号：US20210033965A1

公开(公告)日：2021-02-04

申请号：US16901466

申请日：2020-06-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Ginam PARK ,  Sangmin KIM ,  Jongsam KIM ,  Hongjin KIM ,  Chuljun PARK ,  Yongjun AHN ,  Sangkyung LEE ,  Junyong LEE ,  Taijo JEON ,  Kyubum CHO

IPC: G03F1/66 ,  B01D46/44 ,  B01D46/00 ,  B01D46/42 ,  F24F3/14 ,  H05B1/02 ,  F24H3/04 ,  F25B21/02

Abstract: An apparatus for storing a mask includes a main body comprising a first region and a second region, the first region having a plurality of mask containers, a gas supply pipe having an outer portion outside of the main body, a fan in the first region to propel the gas from the second region to the first region, a filter disposed at a front end and/or a rear end of the fan, a heat exchanger in the second region and configured to exchange heat with the flowing gas, a Peltier element at the outer portion of the gas supply pipe, a first sensor installed in the gas supply pipe upstream of the Peltier element, a second sensor installed in the second region in a lower position to the heat exchanger, and a controller connected to the first and second sensors and the Peltier element.

公开(公告)号：US20200176293A1

公开(公告)日：2020-06-04

申请号：US16529082

申请日：2019-08-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sangkyung LEE ,  Yong-Jun AHN ,  Taijo JEON ,  Kyubum CHO ,  Jongsam KIM ,  Gi-Nam PARK ,  Chul-Jun PARK ,  Junyong LEE

IPC: H01L21/673 ,  B05B1/30 ,  H01L21/67

Abstract: A semiconductor wafer storage system includes a container that provides a space in which a semiconductor wafer is to be stored, a fluid supply that provides a fluid to the container, a connection part that receives the fluid from the fluid supply and transfers the fluid to the container, and a nozzle part that connects the connection part to the container. The container may include a coupling plate to which the nozzle part is coupled, and the nozzle part may include a first nozzle and a second nozzle.