-
1.发明授权公开(公告)号：US10964570B2
公开(公告)日：2021-03-30
申请号：US16529082
申请日：2019-08-01
发明人： Sangkyung Lee , Yong-Jun Ahn , Taijo Jeon , Kyubum Cho , Jongsam Kim , Gi-Nam Park , Chul-Jun Park , Junyong Lee
IPC分类号： H01L21/673 , H01L21/67 , B05B1/30
摘要： A semiconductor wafer storage system includes a container that provides a space in which a semiconductor wafer is to be stored, a fluid supply that provides a fluid to the container, a connection part that receives the fluid from the fluid supply and transfers the fluid to the container, and a nozzle part that connects the connection part to the container. The container may include a coupling plate to which the nozzle part is coupled, and the nozzle part may include a first nozzle and a second nozzle.
-
公开(公告)号：US11262649B2
公开(公告)日：2022-03-01
申请号：US16901466
申请日：2020-06-15
发明人： Ginam Park , Sangmin Kim , Jongsam Kim , Hongjin Kim , Chuljun Park , Yongjun Ahn , Sangkyung Lee , Junyong Lee , Taijo Jeon , Kyubum Cho
IPC分类号： G03F1/66 , B01D46/00 , B01D46/44 , F25B21/02 , F24F3/14 , H05B1/02 , F24H3/04 , B01D46/42 , B01D50/00
摘要： An apparatus for storing a mask includes a main body comprising a first region and a second region, the first region having a plurality of mask containers, a gas supply pipe having an outer portion outside of the main body, a fan in the first region to propel the gas from the second region to the first region, a filter disposed at a front end and/or a rear end of the fan, a heat exchanger in the second region and configured to exchange heat with the flowing gas, a Peltier element at the outer portion of the gas supply pipe, a first sensor installed in the gas supply pipe upstream of the Peltier element, a second sensor installed in the second region in a lower position to the heat exchanger, and a controller connected to the first and second sensors and the Peltier element.
-
搜索结果
2 条记录 (耗时 0.016 秒)
