公开(公告)号：US20190057882A1

公开(公告)日：2019-02-21

申请号：US15867791

申请日：2018-01-11

Applicant: Samsung Electronics Co., Ltd.

Inventor： Tae-Hong KIM ,  Jung-Min OH ,  Jin-Kyu KIM ,  So-Young PARK ,  Kang-Suk LEE

IPC: H01L21/67 ,  B05B7/24 ,  B05B7/04 ,  B05B12/08 ,  B05B13/02 ,  B08B3/02 ,  B08B3/10

Abstract: A nozzle includes a nozzle body having a hollow portion, and a mixing chamber and a discharge guide sequentially connected to the hollow portion, and an engagement member having a gas supply passage formed to supply a gas therethrough, inserted and fixed into the hollow portion and spaced apart from an inner face of the hollow portion to form a liquid gas supply passage which supplies a liquid toward a central axis of an exit of the gas supply passage. The mixing chamber is connected to the gas supply passage and the liquid supply passage to form liquid droplets. The gas supply passage has a first cross-sectional area, the mixing chamber has a second cross-sectional area substantially the same as the first cross-sectional area, and the discharge guide has a third cross-sectional area smaller than the first cross-sectional area.