公开(公告)号：US20210062335A1

公开(公告)日：2021-03-04

申请号：US17010541

申请日：2020-09-02

Applicant: Samsung Electronics Co., Ltd.

Inventor： Byunghwan Kong ,  Hyouncheol Kim ,  Junseong Park ,  Jaewon Yu ,  Hyunju Lee ,  Kwanghyun Jin ,  Youngmin Ha

IPC: C23C16/44 ,  B05B1/02

Abstract: An apparatus for manufacturing a semiconductor device includes a boat configured to support a plurality of stacked substrates, a first tube surrounding the boat in a lateral direction and having a cylindrical shape with an upper portion thereof being open, and a cleaning gas supply nozzle extending from an outer portion of the first tube to a portion between an interior sidewall of the first tube and the boat. The cleaning gas supply nozzle may include a first segment extending from the outer portion of the first tube to an inner portion of the first tube, a second segment extending in a lengthwise direction of the first tube from an end of the first segment, and a third segment extending in a direction differing from the extension direction of the second segment from an end of the second segment.