公开(公告)号：US20210062335A1

公开(公告)日：2021-03-04

申请号：US17010541

申请日：2020-09-02

Applicant: Samsung Electronics Co., Ltd.

Inventor： Byunghwan Kong ,  Hyouncheol Kim ,  Junseong Park ,  Jaewon Yu ,  Hyunju Lee ,  Kwanghyun Jin ,  Youngmin Ha

IPC: C23C16/44 ,  B05B1/02

Abstract: An apparatus for manufacturing a semiconductor device includes a boat configured to support a plurality of stacked substrates, a first tube surrounding the boat in a lateral direction and having a cylindrical shape with an upper portion thereof being open, and a cleaning gas supply nozzle extending from an outer portion of the first tube to a portion between an interior sidewall of the first tube and the boat. The cleaning gas supply nozzle may include a first segment extending from the outer portion of the first tube to an inner portion of the first tube, a second segment extending in a lengthwise direction of the first tube from an end of the first segment, and a third segment extending in a direction differing from the extension direction of the second segment from an end of the second segment.

公开(公告)号：USD810098S1

公开(公告)日：2018-02-13

申请号：US29567611

申请日：2016-06-10

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Designer： Jinha Lee ,  Junseong Park ,  Dahye Shim ,  Francis Oh

公开(公告)号：US11946138B2

公开(公告)日：2024-04-02

申请号：US17543807

申请日：2021-12-07

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jaeheung Lee ,  Junseong Park ,  Kanghun Lee ,  Seongwan Kim ,  Hyouncheol Kim

IPC: C23C16/455 ,  C23C16/52 ,  H01L21/67 ,  C23C16/44 ,  F16K1/36 ,  F16K31/126 ,  F16K51/02

CPC classification number: C23C16/45525 ,  C23C16/52 ,  H01L21/67017 ,  H01L21/67253 ,  C23C16/4412 ,  C23C16/45546 ,  F16K1/36 ,  F16K31/126 ,  F16K51/02

Abstract: A vacuum valve includes a valve flange having a first port, a second port, and a valve seat in a space between the first port and the second port, a valve body in the valve flange, the valve body having a contact surface facing the valve seat, and the valve body being moveable to have the contact surface contact the valve seat and to be separated from the valve seat, a disk on the contact surface of the valve body, the disk having an inclined surface inclined toward the second port, and an actuator connected to the valve flange, the actuator being configured to apply a driving force to the valve body to move the contact surface of the valve body into or out of contact with the valve seat.