公开(公告)号：US20200161099A1

公开(公告)日：2020-05-21

申请号：US16444590

申请日：2019-06-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jin-Uk Park ,  Sun-Ho Kim ,  Sung-Jin Kim ,  Jong-Geug Kim ,  Kyu-Chul Shim ,  Ji-Hoon Yeo ,  Shin-Sang Lee ,  Gyu-Chan Jeoung ,  Sung-Wook Jung ,  Jae-Chul Hwang

IPC: H01J37/32 ,  H01L21/687

Abstract: An apparatus for attaching a pad on or to an edge ring includes a chamber defining a space for attaching a pad on or to an edge ring, a pad support within the chamber and supporting the pad thereon, an edge ring support within the chamber and facing the pad support, the edge ring support securing the edge ring thereon, a driving system connected to at least one of the pad support and the edge ring support and configured to move the edge ring support relative to the pad support, and a vacuum exhaust system configured to create a vacuum atmosphere within the chamber.

公开(公告)号：US11189467B2

公开(公告)日：2021-11-30

申请号：US16444590

申请日：2019-06-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jin-Uk Park ,  Sun-Ho Kim ,  Sung-Jin Kim ,  Jong-Geug Kim ,  Kyu-Chul Shim ,  Ji-Hoon Yeo ,  Shin-Sang Lee ,  Gyu-Chan Jeoung ,  Sung-Wook Jung ,  Jae-Chul Hwang

IPC: H01J37/32 ,  H01L21/687

Abstract: An apparatus for attaching a pad on or to an edge ring includes a chamber defining a space for attaching a pad on or to an edge ring, a pad support within the chamber and supporting the pad thereon, an edge ring support within the chamber and facing the pad support, the edge ring support securing the edge ring thereon, a driving system connected to at least one of the pad support and the edge ring support and configured to move the edge ring support relative to the pad support, and a vacuum exhaust system configured to create a vacuum atmosphere within the chamber.