Abstract:
An apparatus for attaching a pad on or to an edge ring includes a chamber defining a space for attaching a pad on or to an edge ring, a pad support within the chamber and supporting the pad thereon, an edge ring support within the chamber and facing the pad support, the edge ring support securing the edge ring thereon, a driving system connected to at least one of the pad support and the edge ring support and configured to move the edge ring support relative to the pad support, and a vacuum exhaust system configured to create a vacuum atmosphere within the chamber.
Abstract:
Provided is a time-to-digital converter. The time-to-digital converter includes several delay circuits, an adder configured to count outputs of the delay circuits, and a least significant bit (LSB) truncation circuit configured to truncate a predetermined number of LSBs from a result output by the adder. The time-to-digital converter is configured to determine a time interval between a start signal and a stop signal within one cycle of a clock having a predetermined period.
Abstract:
A semiconductor package comprises a lower package comprising a lower substrate, a lower semiconductor chip mounted on a surface of the lower substrate, connection terminals between the lower substrate and the lower semiconductor chip, and a protection film covering the lower semiconductor chip. An upper package is spaced apart from the lower package on an upper surface of the lower substrate, the upper package comprising an upper substrate and an upper semiconductor chip. Connections are present between the lower substrate and the upper substrate to horizontally surround the lower semiconductor chip. A molding film is on the upper surface of the lower substrate to fill spaces between the connection terminals and the connections. An uppermost surface of the protection film is positioned at substantially a same vertical level as an uppermost surface of the molding film and is spaced apart from the upper package.
Abstract:
A current reference circuit includes a reference current supply unit configured to generate a reference current having a target current level, a current-frequency converter configured to receive a first temporary reference current corresponding to the reference current from the reference current supply unit and to generate a first comparison clock signal in response to the first temporary reference current, and a first current compensation unit configured to generate a first current compensation signal used for the first temporary reference current to reach the target current level in response to a frequency of a reference clock signal and a frequency of the first comparison clock signal.
Abstract:
An apparatus for attaching a pad on or to an edge ring includes a chamber defining a space for attaching a pad on or to an edge ring, a pad support within the chamber and supporting the pad thereon, an edge ring support within the chamber and facing the pad support, the edge ring support securing the edge ring thereon, a driving system connected to at least one of the pad support and the edge ring support and configured to move the edge ring support relative to the pad support, and a vacuum exhaust system configured to create a vacuum atmosphere within the chamber.
Abstract:
A phase locked loop having a dual bandwidth is disclosed. The phase locked loop divides a loop filter into a zero filter and a pole filter, disposes the zero filter in front of a phase-frequency detector (PFD), and performs high-pass filtering on a voltage-controlled oscillator (VCO) noise with a maximum bandwidth and performs low-pass filtering on a charge pump noise (CP noise) with a minimum bandwidth to divide the VCO noise and the CP noise.
Abstract:
A semiconductor device includes a capacitor with reduced oxygen defects at an interface between a dielectric layer and an electrode of the capacitor. The semiconductor device includes a lower metal layer; a dielectric layer on the lower metal layer and containing a first metal; a sacrificial layer on the dielectric layer and containing a second metal; and an upper metal layer on the sacrificial layer. An electronegativity of the second metal in the sacrificial layer is greater than an electronegativity of the first metal in the dielectric layer.
Abstract:
A semiconductor device includes a capacitor with reduced oxygen defects at an interface between a dielectric layer and an electrode of the capacitor. The semiconductor device includes a lower metal layer; a dielectric layer on the lower metal layer and containing a first metal; a sacrificial layer on the dielectric layer and containing a second metal; and an upper metal layer on the sacrificial layer. An electronegativity of the second metal in the sacrificial layer is greater than an electronegativity of the first metal in the dielectric layer.
Abstract:
A semiconductor package comprises a lower package comprising a lower substrate, a lower semiconductor chip mounted on a surface of the lower substrate, connection terminals between the lower substrate and the lower semiconductor chip, and a protection film covering the lower semiconductor chip. An upper package is spaced apart from the lower package on an upper surface of the lower substrate, the upper package comprising an upper substrate and an upper semiconductor chip. Connections are present between the lower substrate and the upper substrate to horizontally surround the lower semiconductor chip. A molding film is on the upper surface of the lower substrate to fill spaces between the connection terminals and the connections. An uppermost surface of the protection film is positioned at substantially a same vertical level as an uppermost surface of the molding film and is spaced apart from the upper package.