公开(公告)号：US11217495B2

公开(公告)日：2022-01-04

申请号：US17008627

申请日：2020-08-31

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sang-Young Kim ,  Kyung-Soo Rho ,  Ho-Jeong Moon ,  Hyuck Shin ,  Sun-Nyeong Jung

IPC: H01L21/66 ,  G21K1/10 ,  G01N23/04 ,  H01L23/31 ,  H01L23/00 ,  H01L25/065

Abstract: An X-ray source is disposed and a detector is disposed adjacent to the X-ray source. A test specimen holder is disposed between the X-ray source and the detector. A filter is disposed between the X-ray source and the test specimen holder. The filter has a plate-shaped semiconductor, a granular semiconductor, or a combination thereof.