METHODS AND SYSTEM OF ENHANCED NEAR-INFRARED LIGHT ABSORPTION OF IMAGING SYSTEMS USING METASURFACES AND NANOSTRUCTURES

    公开(公告)号:US20220359772A1

    公开(公告)日:2022-11-10

    申请号:US17703961

    申请日:2022-03-24

    Abstract: A pixel for an imaging sensor is disclosed that includes a photodetector and a metasurface. The photodetector includes a first surface and sidewalls that extend into the photodetector in a first direction from the first surface. The metasurface is formed on the first surface and includes nanostructures that bend a predetermined range of wavelengths of light at least 70 degrees in opposing angles from a direction that is substantially perpendicular to the first surface, and a standing wave pattern forms in an active region of the pixel. The predetermined range of wavelengths of light includes 700 nm to 1100 nm inclusive. In one embodiment, the pixel is a silicon-based photodetector, a thickness of the pixel in the first direction is less than or equal to 5 μm, and the pixel absorbs at least 20% of a power of the predetermined range of wavelengths of light.

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