公开(公告)号：US20200298346A1

公开(公告)日：2020-09-24

申请号：US16517789

申请日：2019-07-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Young-Chul KWON ,  Man-Hee HAN

IPC: B23K26/53 ,  H01L21/268 ,  H01L21/78 ,  B23K26/06 ,  B23K26/073 ,  B23K26/08 ,  B23K26/402

Abstract: A laser apparatus may include a spectrum controller and a spectrum modulator. The spectrum controller may control a center wavelength and/or a bandwidth of a spectrum of a laser beam. The spectrum modulator may modulate the spectrum of the laser beam having the center wavelength and/or the bandwidth controlled by the spectrum controller. Thus, the laser beam may have the spectrum optimal for a semiconductor fabrication process. Particularly, the substrate may be accurately diced using the laser beam having the optimal spectrum.